Landreau, X., Lanfant, B., Merle, T., Laborde, E., Dublanche-Tixier, C., Tristant, P. (2011) Ordering of SiOxHyCz islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation. The European Physical Journal D, 65. 421-428 doi:10.1140/epjd/e2011-20503-7
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Ordering of SiOxHyCz islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation | ||
Journal | The European Physical Journal D | ||
Authors | Landreau, X. | Author | |
Lanfant, B. | Author | ||
Merle, T. | Author | ||
Laborde, E. | Author | ||
Dublanche-Tixier, C. | Author | ||
Tristant, P. | Author | ||
Year | 2011 (December) | Volume | 65 |
Publisher | Springer Science and Business Media LLC | ||
DOI | doi:10.1140/epjd/e2011-20503-7Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 10360183 | Long-form Identifier | mindat:1:5:10360183:2 |
GUID | 0 | ||
Full Reference | Landreau, X., Lanfant, B., Merle, T., Laborde, E., Dublanche-Tixier, C., Tristant, P. (2011) Ordering of SiOxHyCz islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation. The European Physical Journal D, 65. 421-428 doi:10.1140/epjd/e2011-20503-7 | ||
Plain Text | Landreau, X., Lanfant, B., Merle, T., Laborde, E., Dublanche-Tixier, C., Tristant, P. (2011) Ordering of SiOxHyCz islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation. The European Physical Journal D, 65. 421-428 doi:10.1140/epjd/e2011-20503-7 | ||
In | (n.d.) The European Physical Journal D Vol. 65. Springer Science and Business Media LLC |
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