Matthias, Paul, Bandelow, Gunnar, Matyash, Konstantin, Duras, Julia, Hacker, Philipp, Kahnfeld, Daniel, Kemnitz, Stefan, Lewerentz, Lars, Lüskow, Karl F., Meichsner, Jürgen, Schneider, Ralf (2018) PIC simulations of capacitively coupled oxygen rf discharges. The European Physical Journal D, 72. doi:10.1140/epjd/e2017-80565-y
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | PIC simulations of capacitively coupled oxygen rf discharges | ||
| Journal | The European Physical Journal D | ||
| Authors | Matthias, Paul | Author | |
| Bandelow, Gunnar | Author | ||
| Matyash, Konstantin | Author | ||
| Duras, Julia | Author | ||
| Hacker, Philipp | Author | ||
| Kahnfeld, Daniel | Author | ||
| Kemnitz, Stefan | Author | ||
| Lewerentz, Lars | Author | ||
| Lüskow, Karl F. | Author | ||
| Meichsner, Jürgen | Author | ||
| Schneider, Ralf | Author | ||
| Year | 2018 (May) | Volume | 72 |
| Publisher | Springer Science and Business Media LLC | ||
| DOI | doi:10.1140/epjd/e2017-80565-ySearch in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 10362218 | Long-form Identifier | mindat:1:5:10362218:9 |
| GUID | 0 | ||
| Full Reference | Matthias, Paul, Bandelow, Gunnar, Matyash, Konstantin, Duras, Julia, Hacker, Philipp, Kahnfeld, Daniel, Kemnitz, Stefan, Lewerentz, Lars, Lüskow, Karl F., Meichsner, Jürgen, Schneider, Ralf (2018) PIC simulations of capacitively coupled oxygen rf discharges. The European Physical Journal D, 72. doi:10.1140/epjd/e2017-80565-y | ||
| Plain Text | Matthias, Paul, Bandelow, Gunnar, Matyash, Konstantin, Duras, Julia, Hacker, Philipp, Kahnfeld, Daniel, Kemnitz, Stefan, Lewerentz, Lars, Lüskow, Karl F., Meichsner, Jürgen, Schneider, Ralf (2018) PIC simulations of capacitively coupled oxygen rf discharges. The European Physical Journal D, 72. doi:10.1140/epjd/e2017-80565-y | ||
| In | (n.d.) The European Physical Journal D Vol. 72. Springer Science and Business Media LLC | ||
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