Reference Type | Journal (article/letter/editorial) |
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Title | Study on Substrate Temperature Field during its Swing Movement in Miniature HFCVD System |
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Journal | Applied Mechanics and Materials |
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Authors | Zuo, Dun Wen | Author |
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Zeng, Dang | Author |
Wang, Hong Xiang | Author |
Lu, Wen Zhuang | Author |
Wang, M. | Author |
Year | 2007 (December) | Volume | 10 |
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Publisher | Trans Tech Publications, Ltd. |
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DOI | doi:10.4028/www.scientific.net/amm.10-12.599Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 11762590 | Long-form Identifier | mindat:1:5:11762590:9 |
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|
GUID | 0 |
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Full Reference | Zuo, Dun Wen, Zeng, Dang, Wang, Hong Xiang, Lu, Wen Zhuang, Wang, M. (2007) Study on Substrate Temperature Field during its Swing Movement in Miniature HFCVD System. Applied Mechanics and Materials, 10. 599-604 doi:10.4028/www.scientific.net/amm.10-12.599 |
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Plain Text | Zuo, Dun Wen, Zeng, Dang, Wang, Hong Xiang, Lu, Wen Zhuang, Wang, M. (2007) Study on Substrate Temperature Field during its Swing Movement in Miniature HFCVD System. Applied Mechanics and Materials, 10. 599-604 doi:10.4028/www.scientific.net/amm.10-12.599 |
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In | (n.d.) Applied Mechanics and Materials Vol. 10. Trans Tech Publications, Ltd. |
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