Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Chen, Han, Rong, Hua (2012) An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency. Key Engineering Materials, 503. 308-311 doi:10.4028/www.scientific.net/kem.503.308

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleAn In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
JournalKey Engineering Materials
AuthorsChen, HanAuthor
Rong, HuaAuthor
Year2012 (February)Volume503
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/kem.503.308Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID12012502Long-form Identifiermindat:1:5:12012502:1
GUID0
Full ReferenceChen, Han, Rong, Hua (2012) An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency. Key Engineering Materials, 503. 308-311 doi:10.4028/www.scientific.net/kem.503.308
Plain TextChen, Han, Rong, Hua (2012) An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency. Key Engineering Materials, 503. 308-311 doi:10.4028/www.scientific.net/kem.503.308
In(n.d.) Key Engineering Materials Vol. 503. Trans Tech Publications, Ltd.

See Also

These are possibly similar items as determined by title/reference text matching only.

Rong, Hua, Yu, Chang Ling (2012) Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius. Key Engineering Materials, 503. 381-385 doi:10.4028/www.scientific.net/kem.503.381
Chen, Han, Rong, Hua, Wang, Ming (2009) A In Situ Measuring Method for Stress Gradient of a MEMS Film. Advanced Materials Research, 60. 357-360 doi:10.4028/www.scientific.net/amr.60-61.357
Zhang, Chi, Chen, Yun Han, You, Zheng, Huang, Hu (2012) Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror. Key Engineering Materials, 503. 24-28 doi:10.4028/www.scientific.net/kem.503.24
He, Wen Tao, Chen, De Yong, Li, Guang Bei, Wang, Jun Bo (2012) Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS. Key Engineering Materials, 503. 75-80 doi:10.4028/www.scientific.net/kem.503.75
Chen, Jun Shou, You, Zheng, Ruan, Yong, Hu, Mu Zhi (2012) New Isolation Optimization Method of RF MEMS Capacitive Switches. Key Engineering Materials, 503. 35-42 doi:10.4028/www.scientific.net/kem.503.35
Liu, Y.M., Tian, W.J., Zhang, S.J. (2005) Determination of Young's Modulus of Micromechanical Silicon Films Using an Acoustic Excitation and Optical Detection Resonance Method. Key Engineering Materials, 295. 57-64 doi:10.4028/www.scientific.net/kem.295-296.57
Zhu, Zheng, Liao, Xiao Ping, Hua, Di (2011) Study of a Capacitive Clamped Beam RF MEMS Power Sensor Based on MEMS Technology. Key Engineering Materials, 483. 503-507 doi:10.4028/www.scientific.net/kem.483.503
Chen, Guo Rong, Chen, Xiao Bo (2012) An Oil Transportation Network Planning Method Based on Evolution. Key Engineering Materials, 522. 915-920 doi:10.4028/www.scientific.net/kem.522.915
Chen, Xiao Liang, Zhang, Long, Li, Ding Yu (2017) Measurement Model for Young's Modulus of Axially Functionally Graded Materials. Key Engineering Materials, 748. 391-395 doi:10.4028/www.scientific.net/kem.748.391
Liu, Tong, Liao, Xiao Ping (2012) Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology. Key Engineering Materials, 503. 91-96 doi:10.4028/www.scientific.net/kem.503.91
Han, Wei, Wu, Li Ming, Deng, Yao Hua, Zhang, He Yun (2012) Researching a Online Method of Measuring Three-Dimensional Deformation for Large Overhead Crossbeam. Key Engineering Materials, 522. 272-277 doi:10.4028/www.scientific.net/kem.522.272
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 21, 2025 02:00:41
Go to top of page