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Marsi, Noraini, Burhanuddin, Yeop Majlis, Azlan Hamzah, Azrul, Mohd-Yasin, Faisal (2013) Characterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer. Key Engineering Materials, 594. 1083-1086 doi:10.4028/www.scientific.net/kem.594-595.1083

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Reference TypeJournal (article/letter/editorial)
TitleCharacterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer
JournalKey Engineering Materials
AuthorsMarsi, NorainiAuthor
Burhanuddin, Yeop MajlisAuthor
Azlan Hamzah, AzrulAuthor
Mohd-Yasin, FaisalAuthor
Year2013 (December)Volume594
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/kem.594-595.1083Search in ResearchGate
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Mindat Ref. ID12018462Long-form Identifiermindat:1:5:12018462:2
GUID0
Full ReferenceMarsi, Noraini, Burhanuddin, Yeop Majlis, Azlan Hamzah, Azrul, Mohd-Yasin, Faisal (2013) Characterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer. Key Engineering Materials, 594. 1083-1086 doi:10.4028/www.scientific.net/kem.594-595.1083
Plain TextMarsi, Noraini, Burhanuddin, Yeop Majlis, Azlan Hamzah, Azrul, Mohd-Yasin, Faisal (2013) Characterization of ProTEX® PSB Thin Film as a Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer. Key Engineering Materials, 594. 1083-1086 doi:10.4028/www.scientific.net/kem.594-595.1083
In(n.d.) Key Engineering Materials Vol. 594. Trans Tech Publications, Ltd.

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Marsi, Noraini, Burhanuddin Yeop, Majlis, Hamzah, Azrul Azlan, Mohd-Yasin, Faisal (2014) Growth and Characterization of (100) and (111) 3C-SiC Thin Film for MEMS Capacitive Pressure Sensor for Extreme Environments. Advanced Materials Research, 1024. 356-359 doi:10.4028/www.scientific.net/amr.1024.356
Marsi, Noraini, Yeop Majlis, Burhanuddin, Azlan Hamzah, Azrul, Mohd-Yasin, Faisal (2015) The Mechanical Characterization of Bending Test for MEMS Capacitive Pressure Sensor Based 3C-SiC in High Temperature. Applied Mechanics and Materials, 754. 602-605 doi:10.4028/www.scientific.net/amm.754-755.602
Mohd Mustapha, Haslinawati, Mohamed, Mohd Ambri, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop (2017) Dynamic Characteristics of Circular and Square Graphene Diaphragm for Capacitive Microphone. Materials Science Forum, 889. 243-247 doi:10.4028/www.scientific.net/msf.889.243
Marsi, N, Majlis, B Y, Mohd-Yasin, F, Hamzah, A A, Rus, A Z Mohd (2016) ProTEK PSB as Biotechnology Photosensitive Protection Mask on 3C-SiC-on-Si in MEMS Sensor. IOP Conference Series: Materials Science and Engineering, 160. 12093pp. doi:10.1088/1757-899x/160/1/012093
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