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Park, Won Zoo, Tanigawa, Manabu, Kajiwara, Toshinori, Muraoka, Katsunori, Masuda, Mitsuharu, Okada, Tatsuo, Maeda, Mitsuo, Suzuki, Atsushi, Matsuda, Akihisa (1992) Effect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 31. 2917-2918 doi:10.1143/jjap.31.2917

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Reference TypeJournal (article/letter/editorial)
TitleEffect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence
JournalJapanese Journal of Applied Physics
AuthorsPark, Won ZooAuthor
Tanigawa, ManabuAuthor
Kajiwara, ToshinoriAuthor
Muraoka, KatsunoriAuthor
Masuda, MitsuharuAuthor
Okada, TatsuoAuthor
Maeda, MitsuoAuthor
Suzuki, AtsushiAuthor
Matsuda, AkihisaAuthor
Year1992 (September 15)Volume31
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.31.2917Search in ResearchGate
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Mindat Ref. ID14997788Long-form Identifiermindat:1:5:14997788:5
GUID0
Full ReferencePark, Won Zoo, Tanigawa, Manabu, Kajiwara, Toshinori, Muraoka, Katsunori, Masuda, Mitsuharu, Okada, Tatsuo, Maeda, Mitsuo, Suzuki, Atsushi, Matsuda, Akihisa (1992) Effect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 31. 2917-2918 doi:10.1143/jjap.31.2917
Plain TextPark, Won Zoo, Tanigawa, Manabu, Kajiwara, Toshinori, Muraoka, Katsunori, Masuda, Mitsuharu, Okada, Tatsuo, Maeda, Mitsuo, Suzuki, Atsushi, Matsuda, Akihisa (1992) Effect of Laser-Induced Dissociation during Measurements of Hydrogen Atoms in Silane Plasmas Using Two-Photon-Excited Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 31. 2917-2918 doi:10.1143/jjap.31.2917
In(1992) Japanese Journal of Applied Physics Vol. 31. Japan Society of Applied Physics

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Kajiwara, Toshinori, Takeda, Kazuyuki, Kim, Hee Je, Park, Won Zoo, Okada, Tatsuo, Maeda, Mitsuo, Muraoka, Katsunori, Akazaki, Masanori (1990) Application of Laser Fluorescence Spectroscopy by Two-Photon Excitation into Atomic Hydrogen Density Measurement in Reactive Plasmas. Japanese Journal of Applied Physics, 29. doi:10.1143/jjap.29.l154
Kajiwara, Toshinori, Shinkawa, Tatsuya, Uchino, Kiichiro, Masuda, Mitsuharu, Muraoka, Katsunori, Okada, Tatsuo, Maeda, Mitsuo, Sudo, Sigeru, Obiki, Tokuhiro (1991) Application of two‐photon‐excited laser‐induced fluorescence to atomic hydrogen measurements in the edge region of high‐temperature plasmas. Review of Scientific Instruments, 62 (10). 2345-2349 doi:10.1063/1.1142296
Kajiwara, Toshinori, Takeda, Kazuyuki, Muraoka, Katsunori, Okada, Tatsuo, Maeda, Mitsuo, Akazaki, Masanori (1990) Coaxial Laser Fluorescence System by Two-Photon Excitation for Atomic Hydrogen Detection in High-Temperature Plasmas. Japanese Journal of Applied Physics, 29. doi:10.1143/jjap.29.l826
Kajiwara, Toshinori, Matsuda, Yoshinobu, Muraoka, Katsunori, Okada, Tatsuo, Maeda, Mitsuo, Akazaki, Masanori (1988) In-SituMeasurement of Sputtering Yield of Graphite by VUV Laser Fluorescence Spectroscopy. Japanese Journal of Applied Physics, 27. 1105-1106 doi:10.1143/jjap.27.1105
Kajiwara, Toshinori, Inoue, Masayuki, Okada, Tatsuo, Maeda, Mitsuo, Muraoka, Katsunori, Akazaki, Masanori (1985) Determination of Atomic Hydrogen Density by Lyman-Alpha Laser Fluorescence Spectroscopy. Japanese Journal of Applied Physics, 24. 870-874 doi:10.1143/jjap.24.870
Muraoka, Katsunori, Honda, Chikahisa, Uchino, Kiichiro, Kajiwara, Toshinori, Matsuo, Keiji, Bowden, Mark, Park, Won Zoo, Hirakawa, Yasuyuki, Tanaka, Kenji, Maeda, Mitsuo, Okada, Tatsuo (1992) Laser diagnostics of edge plasmas and laser diagnostics of plasmas for industrial applications (invited). Review of Scientific Instruments, 63 (10). 4913-4919 doi:10.1063/1.1143547
Kajiwara, Toshinori, Inoue, Masayuki, Okada, Tatsuo, Muraoka, Katsunori, Akazaki, Masanori, Maeda, Mitsuo (1985) Measurements of density, surface recombination coefficient, and diffusion coefficient of hydrogen atoms by Lα laser fluorescence spectroscopy. Review of Scientific Instruments, 56 (12). 2213-2216 doi:10.1063/1.1138401
Yamagata, Yukihiko, Kawano, Yasuhiko, Muraoka, Katsunori, Maeda, Mitsuo, Akazaki, Masanori (1991) In-situCalibration for Electric Field Measurements in Glow-Discharge Plasmas by Laser-Induced Fluorescence Using the Optogalvanic Technique. Japanese Journal of Applied Physics, 30. 166-170 doi:10.1143/jjap.30.166
Okada, Tatsuo, Shibamaru, Noboru, Nakayama, Yasushi, Maeda, Mitsuo (1992) Time-of-Flight Measurement of Particles with Laser-Induced Fluorescence in the Plume Produced by Laser Ablation of YBa2Cu3O7-xTarget. Japanese Journal of Applied Physics, 31. doi:10.1143/jjap.31.l367
Ono, Kouichi, Oomori, Tatsuo, Tuda, Mutumi (1992) Measurement of the Cl Atom Concentration in RF Chlorine Plasmas by Two-Photon Laser-Induced Fluorescence. Japanese Journal of Applied Physics, 31. doi:10.1143/jjap.31.l269
Yamakoshi, Hideo, Kato, Mitsuo, Uchino, Kiichiro, Iwata, Tsunehisa, Masuda, Mitsuharu, Muraoka, Katsunori, Maeda, Mitsuo, Akazaki, Masanori (1989) Thomson Scattering Diagnostics of a Discharge-Pumped Excimer Laser. Japanese Journal of Applied Physics, 28. doi:10.1143/jjap.28.l1589
 
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