Ito, Haruhiko, Kumakura, Motoki, Suzuki, Tsuneo, Niibe, Masahito, Kanda, Kazuhiro, Saitoh, Hidetoshi (2016) Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06hc01
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar | ||
| Journal | Japanese Journal of Applied Physics | ||
| Authors | Ito, Haruhiko | Author | |
| Kumakura, Motoki | Author | ||
| Suzuki, Tsuneo | Author | ||
| Niibe, Masahito | Author | ||
| Kanda, Kazuhiro | Author | ||
| Saitoh, Hidetoshi | Author | ||
| Year | 2016 (June 1) | Volume | 55 |
| Issue | 6 | ||
| Publisher | Japan Society of Applied Physics | ||
| DOI | doi:10.7567/jjap.55.06hc01Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15046539 | Long-form Identifier | mindat:1:5:15046539:5 |
| GUID | 0 | ||
| Full Reference | Ito, Haruhiko, Kumakura, Motoki, Suzuki, Tsuneo, Niibe, Masahito, Kanda, Kazuhiro, Saitoh, Hidetoshi (2016) Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06hc01 | ||
| Plain Text | Ito, Haruhiko, Kumakura, Motoki, Suzuki, Tsuneo, Niibe, Masahito, Kanda, Kazuhiro, Saitoh, Hidetoshi (2016) Fabrication of hydrogenated amorphous silicon carbide films by decomposition of hexamethyldisilane with microwave discharge flow of Ar. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06hc01 | ||
| In | (2016, June) Japanese Journal of Applied Physics Vol. 55 (6) Japan Society of Applied Physics | ||
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