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Barinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L. (2020) Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films. Inorganic Materials, 56 (8) 799-808 doi:10.1134/s0020168520080026

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Reference TypeJournal (article/letter/editorial)
TitleEffect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films
JournalInorganic Materials
AuthorsBarinov, A. D.Author
Gurinovich, T. D.Author
Popov, A. I.Author
Chukanova, T. S.Author
Shapetina, M. A.Author
Shupegin, M. L.Author
Year2020 (August)Volume56
Issue8
PublisherPleiades Publishing Ltd
DOIdoi:10.1134/s0020168520080026Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15065757Long-form Identifiermindat:1:5:15065757:8
GUID0
Full ReferenceBarinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L. (2020) Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films. Inorganic Materials, 56 (8) 799-808 doi:10.1134/s0020168520080026
Plain TextBarinov, A. D., Gurinovich, T. D., Popov, A. I., Chukanova, T. S., Shapetina, M. A., Shupegin, M. L. (2020) Effect of Precursor on the Dielectric Properties of Diamond-Like Silicon–Carbon Films. Inorganic Materials, 56 (8) 799-808 doi:10.1134/s0020168520080026
In(2020, August) Inorganic Materials Vol. 56 (8) Pleiades Publishing Ltd

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