Wang, Zhihao, Chen, Jinping, Yu, Tianjun, Zeng, Yi, Guo, Xudong, Wang, Shuangqing, Allenet, Timothée, Vockenhuber, Michaela, Ekinci, Yasin, Yang, Guoqiang, Li, Yi (2023) Sulfonium-Functionalized Polystyrene-Based Nonchemically Amplified Resists Enabling Sub-13 nm Nanolithography. ACS Applied Materials & Interfaces, 15 (1) 2289-2300 doi:10.1021/acsami.2c19940
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Sulfonium-Functionalized Polystyrene-Based Nonchemically Amplified Resists Enabling Sub-13 nm Nanolithography | ||
| Journal | ACS Applied Materials & Interfaces | ||
| Authors | Wang, Zhihao | Author | |
| Chen, Jinping | Author | ||
| Yu, Tianjun | Author | ||
| Zeng, Yi | Author | ||
| Guo, Xudong | Author | ||
| Wang, Shuangqing | Author | ||
| Allenet, Timothée | Author | ||
| Vockenhuber, Michaela | Author | ||
| Ekinci, Yasin | Author | ||
| Yang, Guoqiang | Author | ||
| Li, Yi | Author | ||
| Year | 2023 (January 11) | Volume | 15 |
| Issue | 1 | ||
| Publisher | American Chemical Society (ACS) | ||
| DOI | doi:10.1021/acsami.2c19940Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15663925 | Long-form Identifier | mindat:1:5:15663925:7 |
| GUID | 0 | ||
| Full Reference | Wang, Zhihao, Chen, Jinping, Yu, Tianjun, Zeng, Yi, Guo, Xudong, Wang, Shuangqing, Allenet, Timothée, Vockenhuber, Michaela, Ekinci, Yasin, Yang, Guoqiang, Li, Yi (2023) Sulfonium-Functionalized Polystyrene-Based Nonchemically Amplified Resists Enabling Sub-13 nm Nanolithography. ACS Applied Materials & Interfaces, 15 (1) 2289-2300 doi:10.1021/acsami.2c19940 | ||
| Plain Text | Wang, Zhihao, Chen, Jinping, Yu, Tianjun, Zeng, Yi, Guo, Xudong, Wang, Shuangqing, Allenet, Timothée, Vockenhuber, Michaela, Ekinci, Yasin, Yang, Guoqiang, Li, Yi (2023) Sulfonium-Functionalized Polystyrene-Based Nonchemically Amplified Resists Enabling Sub-13 nm Nanolithography. ACS Applied Materials & Interfaces, 15 (1) 2289-2300 doi:10.1021/acsami.2c19940 | ||
| In | (2023, January) ACS Applied Materials & Interfaces Vol. 15 (1) American Chemical Society (ACS) | ||
See Also
These are possibly similar items as determined by title/reference text matching only.
