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Zhu, Xiao-Na, Shen, Lei, Li, Yu-Chun, Lv, Yu-Dong, Shi, Cai-Yu, Huang, Teng, Huang, Zi-Ying, Zhang, David Wei, Lu, Hong-Liang (2025) Large positive VFB shift achieved by a band alignment modulated with insertion of Ga2O3 dipole layer. Applied Physics Letters, 126 (8). doi:10.1063/5.0252518

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Reference TypeJournal (article/letter/editorial)
TitleLarge positive VFB shift achieved by a band alignment modulated with insertion of Ga2O3 dipole layer
JournalApplied Physics Letters
AuthorsZhu, Xiao-NaAuthor
Shen, LeiAuthor
Li, Yu-ChunAuthor
Lv, Yu-DongAuthor
Shi, Cai-YuAuthor
Huang, TengAuthor
Huang, Zi-YingAuthor
Zhang, David WeiAuthor
Lu, Hong-LiangAuthor
Year2025 (February 24)Volume126
Issue8
PublisherAIP Publishing
DOIdoi:10.1063/5.0252518Search in ResearchGate
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Mindat Ref. ID18101064Long-form Identifiermindat:1:5:18101064:9
GUID0
Full ReferenceZhu, Xiao-Na, Shen, Lei, Li, Yu-Chun, Lv, Yu-Dong, Shi, Cai-Yu, Huang, Teng, Huang, Zi-Ying, Zhang, David Wei, Lu, Hong-Liang (2025) Large positive VFB shift achieved by a band alignment modulated with insertion of Ga2O3 dipole layer. Applied Physics Letters, 126 (8). doi:10.1063/5.0252518
Plain TextZhu, Xiao-Na, Shen, Lei, Li, Yu-Chun, Lv, Yu-Dong, Shi, Cai-Yu, Huang, Teng, Huang, Zi-Ying, Zhang, David Wei, Lu, Hong-Liang (2025) Large positive VFB shift achieved by a band alignment modulated with insertion of Ga2O3 dipole layer. Applied Physics Letters, 126 (8). doi:10.1063/5.0252518
In(2025, March) Applied Physics Letters Vol. 126 (8). AIP Publishing

References Listed

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(2018) Extendable and manufacturable volume-less multi-Vt solution for 7 nm technology node and beyond
Not Yet Imported: - journal-article : 10.1109/TED.2022.3144648

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(2017) High-k metal gate fundamental learning and multi-Vt options for stacked nanosheet gate-all-around transistor
(2016) Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
(2021) Dipole-first gate stack as a scalable and thermal budget flexible multi-Vt solution for nanosheet/CFET devices
(2022) Record 7(N)+7(P) multiple VTs demonstration on GAA Si nanosheet n/pFETs using WFM-less direct interfacial La/Al-dipole technique
Not Yet Imported: - journal-article : 10.1149/MA2009-01/15/725

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Not Yet Imported: - journal-article : 10.1109/TED.2021.3136493

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Not Yet Imported: ECS Transactions - journal-article : 10.1149/1.3481591

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(2007) Dipole moment model explaining nFET Vt tuning utilizing La, Sc, Er, and Sr, doped HfSiON dielectrics , 68
Not Yet Imported: IEEE Transactions on Electron Devices - journal-article : 10.1109/TED.2023.3246435

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Not Yet Imported: IEEE Transactions on Electron Devices - journal-article : 10.1109/TED.2022.3152976

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(2007) Comprehensive study of VFB shift in high-k CMOS—Dipole formation, Fermi-level pinning and oxygen vacancy effect , 341
(2008) Intrinsic correlation between mobility reduction and Vt shift due to interface dipole modulation in HfSiON/SiO2 stack by La or Al addition
(2009) Ti-capping technique as a breakthrough for achieving low threshold voltage, high mobility, and high reliability of pMOSFET with metal gate and high-k dielectrics technologies
(2018) Interface dipole modulation in HfO2/SiO2 MOS stack structures
(2010) The methods to determine flat-band voltage VFB in semiconductor of a MOS structure , 37
Not Yet Imported: - journal-article : 10.1149/2.0201907jss

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Not Yet Imported: - journal-article : 10.1002/adom.202002160

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(2024) ACS Appl. Nano Mater. Atomic-layer-deposited Al2O3 layer inserted in SiO2/HfO2 gate-stack-induced positive flat-band shift with dual interface dipoles for advanced logic device 7, 28496


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