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Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films. European Journal of Inorganic Chemistry, 2015 (19) 3205-3211 doi:10.1002/ejic.201500493

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Reference TypeJournal (article/letter/editorial)
TitleSynthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films
JournalEuropean Journal of Inorganic Chemistry
AuthorsDu, LiyongAuthor
Chu, WenxiangAuthor
Miao, HongyanAuthor
Wang, DaweiAuthor
Xu, ChongyingAuthor
Ding, YuqiangAuthor
Year2015 (July)Volume2015
Issue19
PublisherWiley
DOIdoi:10.1002/ejic.201500493Search in ResearchGate
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Mindat Ref. ID2776864Long-form Identifiermindat:1:5:2776864:6
GUID0
Full ReferenceDu, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films. European Journal of Inorganic Chemistry, 2015 (19) 3205-3211 doi:10.1002/ejic.201500493
Plain TextDu, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, Yuqiang (2015) Synthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films. European Journal of Inorganic Chemistry, 2015 (19) 3205-3211 doi:10.1002/ejic.201500493
In(2015, July) European Journal of Inorganic Chemistry Vol. 2015 (19) Wiley

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Du, Liyong, Chu, Wenxiang, Xu, Chongying, Miao, Hongyan, Ding, Yuqiang (2015) Synthesis, characterization of silicon(iv) compounds containing 2-alkyl-aminopyridine ligands and evaluation of them as CVD precursors. RSC Advances, 5 (74). 59991-59996 doi:10.1039/c5ra07045g
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