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Tarala, V., Ambartsumov, M., Altakhov, A., Martens, V., Shevchenko, M. (2016) Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures. Journal of Crystal Growth, 455. 157-160 doi:10.1016/j.jcrysgro.2016.10.015

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Reference TypeJournal (article/letter/editorial)
TitleGrowing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
JournalJournal of Crystal Growth
AuthorsTarala, V.Author
Ambartsumov, M.Author
Altakhov, A.Author
Martens, V.Author
Shevchenko, M.Author
Year2016 (December)Volume455
PublisherElsevier BV
DOIdoi:10.1016/j.jcrysgro.2016.10.015Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID2912558Long-form Identifiermindat:1:5:2912558:0
GUID0
Full ReferenceTarala, V., Ambartsumov, M., Altakhov, A., Martens, V., Shevchenko, M. (2016) Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures. Journal of Crystal Growth, 455. 157-160 doi:10.1016/j.jcrysgro.2016.10.015
Plain TextTarala, V., Ambartsumov, M., Altakhov, A., Martens, V., Shevchenko, M. (2016) Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures. Journal of Crystal Growth, 455. 157-160 doi:10.1016/j.jcrysgro.2016.10.015
In(2016) Journal of Crystal Growth Vol. 455. Elsevier BV

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Tarala, V. A., Altakhov, A. S., Ambartsumov, M. G., Martens, V. Ya. (2017) Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition. Technical Physics Letters, 43. 74-77 doi:10.1134/s1063785017010138
Tarala, V A, Altakhov, A S, Martens, V Ya, Lisitsyn, S V (2015) Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures. Journal of Physics: Conference Series, 652. 12034pp. doi:10.1088/1742-6596/652/1/012034
Tarala, V. A., Altakhov, A. S., Shevchenko, M. Yu., Valyukhov, D. P., Lisitsyn, S. V., Martens, V. Ya. (2015) Growth of aluminum nitride films by plasma-enhanced atomic layer deposition. Inorganic Materials, 51 (7) 728-735 doi:10.1134/s0020168515070158
Ambartsumov, M.G., Chapura, O.M., Tarala, V.A. (2024) Synthesis of titanium dioxide thin films via thermo- and plasma-enhanced atomic layer deposition. Applied Surface Science, 672. 160822 doi:10.1016/j.apsusc.2024.160822
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