Rauwel, Erwan, Willinger, Marc-Georg, Ducroquet, Frédérique, Rauwel, Protima, Matko, Igor, Kiselev, Dmitry, Pinna, Nicola (2008) Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides. The Journal of Physical Chemistry C, 112 (33). 12754-12759 doi:10.1021/jp8037363
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides | ||
| Journal | The Journal of Physical Chemistry C | ||
| Authors | Rauwel, Erwan | Author | |
| Willinger, Marc-Georg | Author | ||
| Ducroquet, Frédérique | Author | ||
| Rauwel, Protima | Author | ||
| Matko, Igor | Author | ||
| Kiselev, Dmitry | Author | ||
| Pinna, Nicola | Author | ||
| Year | 2008 (August) | Volume | 112 |
| Issue | 33 | ||
| Publisher | American Chemical Society (ACS) | ||
| DOI | doi:10.1021/jp8037363Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 3896216 | Long-form Identifier | mindat:1:5:3896216:9 |
| GUID | 0 | ||
| Full Reference | Rauwel, Erwan, Willinger, Marc-Georg, Ducroquet, Frédérique, Rauwel, Protima, Matko, Igor, Kiselev, Dmitry, Pinna, Nicola (2008) Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides. The Journal of Physical Chemistry C, 112 (33). 12754-12759 doi:10.1021/jp8037363 | ||
| Plain Text | Rauwel, Erwan, Willinger, Marc-Georg, Ducroquet, Frédérique, Rauwel, Protima, Matko, Igor, Kiselev, Dmitry, Pinna, Nicola (2008) Carboxylic Acids as Oxygen Sources for the Atomic Layer Deposition of High-κ Metal Oxides. The Journal of Physical Chemistry C, 112 (33). 12754-12759 doi:10.1021/jp8037363 | ||
| In | (2008, August) The Journal of Physical Chemistry C Vol. 112 (33) American Chemical Society (ACS) | ||
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