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Byun, Jeong Soo, Kang, Sug Bong, Kim, Hyeong Joon, Kim, Cha Yeon, Park, Kyo Ho (1993) Epitaxial growth of CoSi2on Si wafer using Co/Ta bilayer. Journal of Applied Physics, 74 (5). 3156-3161 doi:10.1063/1.354584

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Reference TypeJournal (article/letter/editorial)
TitleEpitaxial growth of CoSi2on Si wafer using Co/Ta bilayer
JournalJournal of Applied Physics
AuthorsByun, Jeong SooAuthor
Kang, Sug BongAuthor
Kim, Hyeong JoonAuthor
Kim, Cha YeonAuthor
Park, Kyo HoAuthor
Year1993 (September)Volume74
Issue5
PublisherAIP Publishing
DOIdoi:10.1063/1.354584Search in ResearchGate
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Mindat Ref. ID5065507Long-form Identifiermindat:1:5:5065507:6
GUID0
Full ReferenceByun, Jeong Soo, Kang, Sug Bong, Kim, Hyeong Joon, Kim, Cha Yeon, Park, Kyo Ho (1993) Epitaxial growth of CoSi2on Si wafer using Co/Ta bilayer. Journal of Applied Physics, 74 (5). 3156-3161 doi:10.1063/1.354584
Plain TextByun, Jeong Soo, Kang, Sug Bong, Kim, Hyeong Joon, Kim, Cha Yeon, Park, Kyo Ho (1993) Epitaxial growth of CoSi2on Si wafer using Co/Ta bilayer. Journal of Applied Physics, 74 (5). 3156-3161 doi:10.1063/1.354584
In(1993, September) Journal of Applied Physics Vol. 74 (5) AIP Publishing

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Bong Kang, Sug, Kim, Sun‐Oo, Byun, Jeong‐Soo, Kim, Hyeong Joon (1994) Comparison of ultrathin SiO2films grown by thermal oxidation in an N2O ambient with those in a 33% O2/N2ambient. Applied Physics Letters, 65 (19). 2448-2450 doi:10.1063/1.112703
Byun, Jeong Soo, Kim, Do‐Heyoung, Kim, Woo Shik, Kim, Hyeong Joon (1995) Epitaxial growth of CoSi2 layer on (100)Si and facet formation at the CoSi2/Si interface. Journal of Applied Physics, 78 (3). 1725-1730 doi:10.1063/1.360201
Byun, Jeong Soo, Kim, Hyeong Joon (1995) Layer sequence and silicide formation of a Co/(refractory metal) bilayer on (100)Si substrate. Journal of Applied Physics, 78 (11). 6784-6790 doi:10.1063/1.360775
Choi, Chi Kyu, Yang, Soo Jeong, Ryu, Jai Yon, Lee, Jeong Yong, Park, Hyung‐Ho, Kwon, Oh Joon, Lee, Yong Pak, Kim, Kun Ho (1993) In situsolid phase epitaxial growth of C49‐TiSi2on Si (111)‐7×7 substrate. Applied Physics Letters, 63 (4). 485-487 doi:10.1063/1.110007
Kang, Sung-Oong, Hong, Sahwan, Choi, Jinsik, Kim, Jin-Soo, Hwang, Inrok, Byun, Ik-Su, Kim, Yeon Soo, Kim, Wondong, Park, Bae Ho (2010) Layer-to-island growth of electrodeposited Cu2O films and filamentary switching in single-channeled grain boundaries. Journal of Applied Physics, 107 (5). 53704pp. doi:10.1063/1.3310805
Byun, Jeong Soo, Rha, Kwan Goo, Kim, Jae Jeong, Kim, Woo Shik, Kim, Hak Nam, Cho, Hae Seok, Kim, Hyeong Joon (1995) Formation of a large grain sized TiN layer using TiNx, the epitaxial continuity at the Al/TiN interface, and its electromigration endurance in multilayered interconnection. Journal of Applied Physics, 78 (3). 1719-1724 doi:10.1063/1.360200
Park, Ji-Soo, Sohn, Dong Kyun, Kim, Yeongcheol, Bae, Jong-Uk, Lee, Byung Hak, Byun, Jeong Soo, Kim, Jae Jeong (1998) Formation of epitaxial CoSi2 spike in Co/Si3N4/Si(100) system and its crystallographic structure. Applied Physics Letters, 73 (16). 2284-2286 doi:10.1063/1.121703
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