Reference Type | Journal (article/letter/editorial) |
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Title | Electromagnetic field structure in a weakly collisional inductively coupled plasma |
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Journal | Journal of Applied Physics |
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Authors | Godyak, V. A. | Author |
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Piejak, R. B. | Author |
Year | 1997 (December 15) | Volume | 82 |
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Issue | 12 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.366496Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5087668 | Long-form Identifier | mindat:1:5:5087668:8 |
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GUID | 0 |
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Full Reference | Godyak, V. A., Piejak, R. B. (1997) Electromagnetic field structure in a weakly collisional inductively coupled plasma. Journal of Applied Physics, 82 (12). 5944-5947 doi:10.1063/1.366496 |
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Plain Text | Godyak, V. A., Piejak, R. B. (1997) Electromagnetic field structure in a weakly collisional inductively coupled plasma. Journal of Applied Physics, 82 (12). 5944-5947 doi:10.1063/1.366496 |
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In | (1997, December) Journal of Applied Physics Vol. 82 (12) AIP Publishing |
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