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Tong, Honghui, Fu, Ricky K. Y., Tang, Deli, Zeng, Xuchu, Chu, Paul K. (2002) Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma. Journal of Applied Physics, 92 (5). 2284-2289 doi:10.1063/1.1499983

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Reference TypeJournal (article/letter/editorial)
TitleEffects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma
JournalJournal of Applied Physics
AuthorsTong, HonghuiAuthor
Fu, Ricky K. Y.Author
Tang, DeliAuthor
Zeng, XuchuAuthor
Chu, Paul K.Author
Year2002 (September)Volume92
Issue5
PublisherAIP Publishing
DOIdoi:10.1063/1.1499983Search in ResearchGate
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Mindat Ref. ID5116574Long-form Identifiermindat:1:5:5116574:7
GUID0
Full ReferenceTong, Honghui, Fu, Ricky K. Y., Tang, Deli, Zeng, Xuchu, Chu, Paul K. (2002) Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma. Journal of Applied Physics, 92 (5). 2284-2289 doi:10.1063/1.1499983
Plain TextTong, Honghui, Fu, Ricky K. Y., Tang, Deli, Zeng, Xuchu, Chu, Paul K. (2002) Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma. Journal of Applied Physics, 92 (5). 2284-2289 doi:10.1063/1.1499983
In(2002, September) Journal of Applied Physics Vol. 92 (5) AIP Publishing

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Tang, Deli, Chu, Paul K. (2003) Effects of assistant anode on planar inductively coupled magnetized argon plasma in plasma immersion ion implantation. Journal of Applied Physics, 93 (10). 5883-5887 doi:10.1063/1.1568151
Chu, Paul K., Fu, Ricky K. Y., Zeng, Xuchu, Kwok, Dixon T. K. (2001) Metallic contamination in hydrogen plasma immersion ion implantation of silicon. Journal of Applied Physics, 90 (8). 3743-3749 doi:10.1063/1.1404422
Zeng, Xuchu, Fu, Ricky K. Y., Kwok, Dixon T. K., Chu, Paul K. (2001) Quasi-direct current plasma immersion ion implantation. Applied Physics Letters, 79 (19). 3044-3046 doi:10.1063/1.1415404
Tang, D. L., Fu, R. K. Y., Tian, X. B., Chu, P. K. (2003) Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation. Review of Scientific Instruments, 74 (5). 2704-2708 doi:10.1063/1.1568559
Tian, Xiubo, Zeng, Zhaoming, Zeng, Xuchu, Tang, Baoyin, Chu, Paul K. (2000) Efficacy of high-frequency, low-voltage plasma immersion ion implantation of a bar-shaped target. Journal of Applied Physics, 88 (5). 2221-2225 doi:10.1063/1.1287221
Tang, Deli, Chu, Paul K. (2003) Anode double layer in magnetized radio frequency inductively coupled hydrogen plasma. Journal of Applied Physics, 94 (3). 1390-1395 doi:10.1063/1.1589592
Lu, Qiu Yuan, Li, Liu He, Fu, Ricky K. Y., Chu, Paul K. (2008) Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation. Journal of Applied Physics, 104 (4). 43303pp. doi:10.1063/1.2969050
Fu, Ricky K. Y., Chu, Paul K., Tian, Xiubo (2004) Influence of thickness and dielectric properties on implantation efficacy in plasma immersion ion implantation of insulators. Journal of Applied Physics, 95 (7). 3319-3323 doi:10.1063/1.1666976
Tang, Deli, Chu, Paul K. (2003) Current control for magnetized plasma in direct-current plasma-immersion ion implantation. Applied Physics Letters, 82 (13). 2014-2016 doi:10.1063/1.1564638
Kwok, Dixon T. K., Pu, Shihao, Fu, Ricky K. Y., Jin, Fanya, Chu, Paul K. (2007) Dependence of ion sheath collapse on secondary electron emission in plasma immersion ion implantation. Applied Physics Letters, 90 (13). 131503pp. doi:10.1063/1.2717082
Jin, Fanya, Tong, Honghui, Shi, Zhongbing, Tang, Deli, Chu, Paul K. (2006) Effects of external magnetic field on propagation of electromagnetic wave in uniform magnetized plasma slabs. Computer Physics Communications, 175. 545-552 doi:10.1016/j.cpc.2006.06.010
 
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