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Zanchetta, E., Della Giustina, G., Brusatin, G. (2014) One-step patterning of double tone high contrast and high refractive index inorganic spin-on resist. Journal of Applied Physics, 116 (10). 103504pp. doi:10.1063/1.4893724

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Reference TypeJournal (article/letter/editorial)
TitleOne-step patterning of double tone high contrast and high refractive index inorganic spin-on resist
JournalJournal of Applied Physics
AuthorsZanchetta, E.Author
Della Giustina, G.Author
Brusatin, G.Author
Year2014 (September 14)Volume116
Issue10
PublisherAIP Publishing
DOIdoi:10.1063/1.4893724Search in ResearchGate
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Mindat Ref. ID5198712Long-form Identifiermindat:1:5:5198712:1
GUID0
Full ReferenceZanchetta, E., Della Giustina, G., Brusatin, G. (2014) One-step patterning of double tone high contrast and high refractive index inorganic spin-on resist. Journal of Applied Physics, 116 (10). 103504pp. doi:10.1063/1.4893724
Plain TextZanchetta, E., Della Giustina, G., Brusatin, G. (2014) One-step patterning of double tone high contrast and high refractive index inorganic spin-on resist. Journal of Applied Physics, 116 (10). 103504pp. doi:10.1063/1.4893724
In(2014, September) Journal of Applied Physics Vol. 116 (10) AIP Publishing

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