Sanchez, Dario Ferreira, Laloum, David, Weleguela, Monica Larissa Djomeni, Ulrich, Olivier, Audoit, Guillaume, Grenier, Adeline, Micha, Jean-Sébastien, Robach, Odile, Lorut, Frédéric, Gergaud, Patrice, Bleuet, Pierre (2014) X-ray μ-Laue diffraction analysis of Cu through-silicon vias: A two-dimensional and three-dimensional study. Journal of Applied Physics, 116 (16). 163509pp. doi:10.1063/1.4899318
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | X-ray μ-Laue diffraction analysis of Cu through-silicon vias: A two-dimensional and three-dimensional study | ||
| Journal | Journal of Applied Physics | ||
| Authors | Sanchez, Dario Ferreira | Author | |
| Laloum, David | Author | ||
| Weleguela, Monica Larissa Djomeni | Author | ||
| Ulrich, Olivier | Author | ||
| Audoit, Guillaume | Author | ||
| Grenier, Adeline | Author | ||
| Micha, Jean-Sébastien | Author | ||
| Robach, Odile | Author | ||
| Lorut, Frédéric | Author | ||
| Gergaud, Patrice | Author | ||
| Bleuet, Pierre | Author | ||
| Year | 2014 (October 28) | Volume | 116 |
| Issue | 16 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4899318Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5199194 | Long-form Identifier | mindat:1:5:5199194:8 |
| GUID | 0 | ||
| Full Reference | Sanchez, Dario Ferreira, Laloum, David, Weleguela, Monica Larissa Djomeni, Ulrich, Olivier, Audoit, Guillaume, Grenier, Adeline, Micha, Jean-Sébastien, Robach, Odile, Lorut, Frédéric, Gergaud, Patrice, Bleuet, Pierre (2014) X-ray μ-Laue diffraction analysis of Cu through-silicon vias: A two-dimensional and three-dimensional study. Journal of Applied Physics, 116 (16). 163509pp. doi:10.1063/1.4899318 | ||
| Plain Text | Sanchez, Dario Ferreira, Laloum, David, Weleguela, Monica Larissa Djomeni, Ulrich, Olivier, Audoit, Guillaume, Grenier, Adeline, Micha, Jean-Sébastien, Robach, Odile, Lorut, Frédéric, Gergaud, Patrice, Bleuet, Pierre (2014) X-ray μ-Laue diffraction analysis of Cu through-silicon vias: A two-dimensional and three-dimensional study. Journal of Applied Physics, 116 (16). 163509pp. doi:10.1063/1.4899318 | ||
| In | (2014, October) Journal of Applied Physics Vol. 116 (16) AIP Publishing | ||
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