Evans, J., Chapman, S. (2014) Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope. Journal of Applied Physics, 116 (6). 66807pp. doi:10.1063/1.4891403
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope | ||
Journal | Journal of Applied Physics | ||
Authors | Evans, J. | Author | |
Chapman, S. | Author | ||
Year | 2014 (August 14) | Volume | 116 |
Issue | 6 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4891403Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5200150 | Long-form Identifier | mindat:1:5:5200150:7 |
GUID | 0 | ||
Full Reference | Evans, J., Chapman, S. (2014) Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope. Journal of Applied Physics, 116 (6). 66807pp. doi:10.1063/1.4891403 | ||
Plain Text | Evans, J., Chapman, S. (2014) Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope. Journal of Applied Physics, 116 (6). 66807pp. doi:10.1063/1.4891403 | ||
In | (2014, August) Journal of Applied Physics Vol. 116 (6) AIP Publishing |
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