Hrkac, Viktor, Kobler, Aaron, Marauska, Stephan, Petraru, Adrian, Schürmann, Ulrich, Kiran Chakravadhanula, Venkata Sai, Duppel, Viola, Kohlstedt, Hermann, Wagner, Bernhard, Lotsch, Bettina Valeska, Kübel, Christian, Kienle, Lorenz (2015) Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride. Journal of Applied Physics, 117 (1). 14301pp. doi:10.1063/1.4905109
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride | ||
| Journal | Journal of Applied Physics | ||
| Authors | Hrkac, Viktor | Author | |
| Kobler, Aaron | Author | ||
| Marauska, Stephan | Author | ||
| Petraru, Adrian | Author | ||
| Schürmann, Ulrich | Author | ||
| Kiran Chakravadhanula, Venkata Sai | Author | ||
| Duppel, Viola | Author | ||
| Kohlstedt, Hermann | Author | ||
| Wagner, Bernhard | Author | ||
| Lotsch, Bettina Valeska | Author | ||
| Kübel, Christian | Author | ||
| Kienle, Lorenz | Author | ||
| Year | 2015 (January 7) | Volume | 117 |
| Issue | 1 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4905109Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5200470 | Long-form Identifier | mindat:1:5:5200470:8 |
| GUID | 0 | ||
| Full Reference | Hrkac, Viktor, Kobler, Aaron, Marauska, Stephan, Petraru, Adrian, Schürmann, Ulrich, Kiran Chakravadhanula, Venkata Sai, Duppel, Viola, Kohlstedt, Hermann, Wagner, Bernhard, Lotsch, Bettina Valeska, Kübel, Christian, Kienle, Lorenz (2015) Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride. Journal of Applied Physics, 117 (1). 14301pp. doi:10.1063/1.4905109 | ||
| Plain Text | Hrkac, Viktor, Kobler, Aaron, Marauska, Stephan, Petraru, Adrian, Schürmann, Ulrich, Kiran Chakravadhanula, Venkata Sai, Duppel, Viola, Kohlstedt, Hermann, Wagner, Bernhard, Lotsch, Bettina Valeska, Kübel, Christian, Kienle, Lorenz (2015) Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride. Journal of Applied Physics, 117 (1). 14301pp. doi:10.1063/1.4905109 | ||
| In | (2015, January) Journal of Applied Physics Vol. 117 (1) AIP Publishing | ||
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