Rapp, S., Heinrich, G., Wollgarten, M., Huber, H. P., Schmidt, M. (2015) Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117 (10). 105304pp. doi:10.1063/1.4914457
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation | ||
Journal | Journal of Applied Physics | ||
Authors | Rapp, S. | Author | |
Heinrich, G. | Author | ||
Wollgarten, M. | Author | ||
Huber, H. P. | Author | ||
Schmidt, M. | Author | ||
Year | 2015 (March 14) | Volume | 117 |
Issue | 10 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.4914457Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5200571 | Long-form Identifier | mindat:1:5:5200571:6 |
GUID | 0 | ||
Full Reference | Rapp, S., Heinrich, G., Wollgarten, M., Huber, H. P., Schmidt, M. (2015) Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117 (10). 105304pp. doi:10.1063/1.4914457 | ||
Plain Text | Rapp, S., Heinrich, G., Wollgarten, M., Huber, H. P., Schmidt, M. (2015) Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation. Journal of Applied Physics, 117 (10). 105304pp. doi:10.1063/1.4914457 | ||
In | (2015, March) Journal of Applied Physics Vol. 117 (10) AIP Publishing |
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