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Lionti, K., Darnon, M., Volksen, W., Magbitang, T., Dubois, G. (2015) The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials. Journal of Applied Physics, 117 (11). 113303pp. doi:10.1063/1.4915508

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Reference TypeJournal (article/letter/editorial)
TitleThe efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials
JournalJournal of Applied Physics
AuthorsLionti, K.Author
Darnon, M.Author
Volksen, W.Author
Magbitang, T.Author
Dubois, G.Author
Year2015 (March 21)Volume117
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.4915508Search in ResearchGate
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Mindat Ref. ID5200665Long-form Identifiermindat:1:5:5200665:4
GUID0
Full ReferenceLionti, K., Darnon, M., Volksen, W., Magbitang, T., Dubois, G. (2015) The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials. Journal of Applied Physics, 117 (11). 113303pp. doi:10.1063/1.4915508
Plain TextLionti, K., Darnon, M., Volksen, W., Magbitang, T., Dubois, G. (2015) The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials. Journal of Applied Physics, 117 (11). 113303pp. doi:10.1063/1.4915508
In(2015, March) Journal of Applied Physics Vol. 117 (11) AIP Publishing

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Bruce, R L, Engelmann, S, Purushothaman, S, Volksen, W, Frot, T J, Magbitang, T, Dubois, G, Darnon, M (2013) Investigation of plasma etch damage to porous oxycarbosilane ultra low-kdielectric. Journal of Physics D: Applied Physics, 46. 265303pp. doi:10.1088/0022-3727/46/26/265303
Isaacson, Scott G., Lionti, Krystelle, Volksen, Willi, Magbitang, Teddie P., Matsuda, Yusuke, Dauskardt, Reinhold H., Dubois, Geraud (2016) Fundamental limits of material toughening in molecularly confined polymers. Nature Materials, 15 (3). 294-298 doi:10.1038/nmat4475
Dubois, G., Volksen, W., Magbitang, T., Miller, R. D., Gage, D. M., Dauskardt, R. H. (2007) Molecular Network Reinforcement of Sol–Gel Glasses. Advanced Materials, 19. 3989-3994 doi:10.1002/adma.200701193
Nichols, M. T., Mavrakakis, K., Lin, Q., Shohet, J. L. (2013) The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials. Journal of Applied Physics, 114 (10). 104107pp. doi:10.1063/1.4821065
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Sinha, H., Lauer, J. L., Nichols, M. T., Antonelli, G. A., Nishi, Y., Shohet, J. L. (2010) Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics. Applied Physics Letters, 96 (5). 52901pp. doi:10.1063/1.3306729
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Guo, X., Jakes, J. E., Banna, S., Nishi, Y., Shohet, J. L. (2014) Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass. Journal of Applied Physics, 116 (4). 44103pp. doi:10.1063/1.4891501
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Graham, W G (1984) Vacuum ultraviolet emission and H-production in a low pressure hydrogen plasma. Journal of Physics D: Applied Physics, 17. 2225-2231 doi:10.1088/0022-3727/17/11/009
 
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