Pešić, Milan, Knebel, Steve, Geyer, Maximilian, Schmelzer, Sebastian, Böttger, Ulrich, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Cho, Kyuho, Jung, Changhwa, Chang, Jaewan, Lim, Hanjin, Mikolajick, Thomas, Schroeder, Uwe (2016) Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes. Journal of Applied Physics, 119 (6). 64101pp. doi:10.1063/1.4941537
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes | ||
| Journal | Journal of Applied Physics | ||
| Authors | Pešić, Milan | Author | |
| Knebel, Steve | Author | ||
| Geyer, Maximilian | Author | ||
| Schmelzer, Sebastian | Author | ||
| Böttger, Ulrich | Author | ||
| Kolomiiets, Nadiia | Author | ||
| Afanas'ev, Valeri V. | Author | ||
| Cho, Kyuho | Author | ||
| Jung, Changhwa | Author | ||
| Chang, Jaewan | Author | ||
| Lim, Hanjin | Author | ||
| Mikolajick, Thomas | Author | ||
| Schroeder, Uwe | Author | ||
| Year | 2016 (February 14) | Volume | 119 |
| Issue | 6 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4941537Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5204889 | Long-form Identifier | mindat:1:5:5204889:0 |
| GUID | 0 | ||
| Full Reference | Pešić, Milan, Knebel, Steve, Geyer, Maximilian, Schmelzer, Sebastian, Böttger, Ulrich, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Cho, Kyuho, Jung, Changhwa, Chang, Jaewan, Lim, Hanjin, Mikolajick, Thomas, Schroeder, Uwe (2016) Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes. Journal of Applied Physics, 119 (6). 64101pp. doi:10.1063/1.4941537 | ||
| Plain Text | Pešić, Milan, Knebel, Steve, Geyer, Maximilian, Schmelzer, Sebastian, Böttger, Ulrich, Kolomiiets, Nadiia, Afanas'ev, Valeri V., Cho, Kyuho, Jung, Changhwa, Chang, Jaewan, Lim, Hanjin, Mikolajick, Thomas, Schroeder, Uwe (2016) Low leakage ZrO2 based capacitors for sub 20 nm dynamic random access memory technology nodes. Journal of Applied Physics, 119 (6). 64101pp. doi:10.1063/1.4941537 | ||
| In | (2016, February) Journal of Applied Physics Vol. 119 (6) AIP Publishing | ||
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