Steib, Frederik, Remmele, Thilo, Gülink, Jan, Fündling, Sönke, Behres, Alexander, Wehmann, Hergo-Heinrich, Albrecht, Martin, Straßburg, Martin, Lugauer, Hans-Jürgen, Waag, Andreas (2018) Defect generation by nitrogen during pulsed sputter deposition of GaN. Journal of Applied Physics, 124 (17). 175701pp. doi:10.1063/1.5037340
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Defect generation by nitrogen during pulsed sputter deposition of GaN | ||
Journal | Journal of Applied Physics | ||
Authors | Steib, Frederik | Author | |
Remmele, Thilo | Author | ||
Gülink, Jan | Author | ||
Fündling, Sönke | Author | ||
Behres, Alexander | Author | ||
Wehmann, Hergo-Heinrich | Author | ||
Albrecht, Martin | Author | ||
Straßburg, Martin | Author | ||
Lugauer, Hans-Jürgen | Author | ||
Waag, Andreas | Author | ||
Year | 2018 (November 7) | Volume | 124 |
Issue | 17 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.5037340Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5210016 | Long-form Identifier | mindat:1:5:5210016:3 |
GUID | 0 | ||
Full Reference | Steib, Frederik, Remmele, Thilo, Gülink, Jan, Fündling, Sönke, Behres, Alexander, Wehmann, Hergo-Heinrich, Albrecht, Martin, Straßburg, Martin, Lugauer, Hans-Jürgen, Waag, Andreas (2018) Defect generation by nitrogen during pulsed sputter deposition of GaN. Journal of Applied Physics, 124 (17). 175701pp. doi:10.1063/1.5037340 | ||
Plain Text | Steib, Frederik, Remmele, Thilo, Gülink, Jan, Fündling, Sönke, Behres, Alexander, Wehmann, Hergo-Heinrich, Albrecht, Martin, Straßburg, Martin, Lugauer, Hans-Jürgen, Waag, Andreas (2018) Defect generation by nitrogen during pulsed sputter deposition of GaN. Journal of Applied Physics, 124 (17). 175701pp. doi:10.1063/1.5037340 | ||
In | (2018, November) Journal of Applied Physics Vol. 124 (17) AIP Publishing |
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