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Etinger-Geller, Yael, Zoubenko, Ekaterina, Baskin, Maria, Kornblum, Lior, Pokroy, Boaz (2019) Thickness dependence of the physical properties of atomic-layer deposited Al2O3. Journal of Applied Physics, 125 (18). 185302pp. doi:10.1063/1.5079987

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Reference TypeJournal (article/letter/editorial)
TitleThickness dependence of the physical properties of atomic-layer deposited Al2O3
JournalJournal of Applied Physics
AuthorsEtinger-Geller, YaelAuthor
Zoubenko, EkaterinaAuthor
Baskin, MariaAuthor
Kornblum, LiorAuthor
Pokroy, BoazAuthor
Year2019 (May 14)Volume125
Issue18
PublisherAIP Publishing
DOIdoi:10.1063/1.5079987Search in ResearchGate
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Mindat Ref. ID5211030Long-form Identifiermindat:1:5:5211030:0
GUID0
Full ReferenceEtinger-Geller, Yael, Zoubenko, Ekaterina, Baskin, Maria, Kornblum, Lior, Pokroy, Boaz (2019) Thickness dependence of the physical properties of atomic-layer deposited Al2O3. Journal of Applied Physics, 125 (18). 185302pp. doi:10.1063/1.5079987
Plain TextEtinger-Geller, Yael, Zoubenko, Ekaterina, Baskin, Maria, Kornblum, Lior, Pokroy, Boaz (2019) Thickness dependence of the physical properties of atomic-layer deposited Al2O3. Journal of Applied Physics, 125 (18). 185302pp. doi:10.1063/1.5079987
In(2019, May) Journal of Applied Physics Vol. 125 (18) AIP Publishing

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Etinger-Geller, Yael, Polishchuk, Iryna, Seknazi, Eva, Livne, Achiya, Ciatto, Gianluca, Pokroy, Boaz (2019) Surface reconstruction causes structural variations in nanometric amorphous Al2O3. Physical Chemistry Chemical Physics, 21 (27). 14887-14891 doi:10.1039/c9cp00942f
Etinger-Geller, Yael, Katsman, Alex, Pokroy, Boaz (2017) Density of Nanometrically Thin Amorphous Films Varies by Thickness. Chemistry of Materials, 29. 4912-4919 doi:10.1021/acs.chemmater.7b01139
Miron, Dror, Krylov, Igor, Baskin, Maria, Yalon, Eilam, Kornblum, Lior (2019) Understanding leakage currents through Al2O3 on SrTiO3. Journal of Applied Physics, 126 (18). 185301pp. doi:10.1063/1.5119703
Rich, Benjamin B., Etinger-Geller, Yael, Ciatto, Gianluca, Katsman, Alexander, Pokroy, Boaz (2021) Retention of surface structure causes lower density in atomic layer deposition of amorphous titanium oxide thin films. Physical Chemistry Chemical Physics, 23 (11) 6600-6612 doi:10.1039/d1cp00341k
Cohen-Azarzar, Dana, Baskin, Maria, Kornblum, Lior (2018) Band offsets at amorphous-crystalline Al2O3–SrTiO3 oxide interfaces. Journal of Applied Physics, 123 (24). 245307pp. doi:10.1063/1.5030119
Kornblum, Noga, Katsman, Alex, Pokroy, Boaz (2019) Selective Deposition of Platinum by Atomic Layer Deposition Using Terraced Oxide Surfaces. The Journal of Physical Chemistry C, 123 (14). 8770-8776 doi:10.1021/acs.jpcc.8b10782
Krylov, Igor, Pokroy, Boaz, Ritter, Dan, Eizenberg, Moshe (2016) A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs. Journal of Applied Physics, 119 (8). 84507pp. doi:10.1063/1.4942657
Miron, Dror, Cohen-Azarzar, Dana, Segev, Noa, Baskin, Maria, Palumbo, Felix, Yalon, Eilam, Kornblum, Lior (2020) Band structure and electronic transport across Ta2O5/Nb:SrTiO3 interfaces. Journal of Applied Physics, 128 (4) 45306pp. doi:10.1063/1.5139533
Kim, Kyungjin, Pierron, Olivier N., Graham, Samuel (2019) Atomic layer deposited Al2O3 capping layer effect on environmentally assisted cracking in SiNx barrier films. Journal of Applied Physics, 125 (4). 45301pp. doi:10.1063/1.5061780
Miron, Dror, Cohen-Azarzar, Dana, Hoffer, Barak, Baskin, Maria, Kvatinsky, Shahar, Yalon, Eilam, Kornblum, Lior (2020) Oxide 2D electron gases as a reservoir of defects for resistive switching. Applied Physics Letters, 116 (22) 223503pp. doi:10.1063/5.0003590
Cohen, Amit; Baskin, Maria; Shoham, Lishai; Caspi, Shaked; Shekhter, Pini; Lee, Tien-Lin; Chambers, Scott A.; Kornblum, Lior (2025) Obtaining bulk-like correlated oxide surfaces with protective caps. Applied Physics Letters, 126 (16). doi:10.1063/5.0256840
 
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