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Koshida, N., Ichinose, Y., Ohtaka, K. (1989) Ion resist properties of thin films of transition metal oxides. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 736-738 doi:10.1016/0168-583x(89)90886-0

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Reference TypeJournal (article/letter/editorial)
TitleIon resist properties of thin films of transition metal oxides
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsKoshida, N.Author
Ichinose, Y.Author
Ohtaka, K.Author
Year1989 (March)Volume39
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90886-0Search in ResearchGate
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Mindat Ref. ID5592641Long-form Identifiermindat:1:5:5592641:0
GUID0
Full ReferenceKoshida, N., Ichinose, Y., Ohtaka, K. (1989) Ion resist properties of thin films of transition metal oxides. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 736-738 doi:10.1016/0168-583x(89)90886-0
Plain TextKoshida, N., Ichinose, Y., Ohtaka, K. (1989) Ion resist properties of thin films of transition metal oxides. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 736-738 doi:10.1016/0168-583x(89)90886-0
In(1989, March) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 39 (1) Elsevier BV

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Koshida, N., Suzuki, Y., Aoyama, T. (1989) Low energy ion implantation studies of polyacetylene films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 708-711 doi:10.1016/0168-583x(89)90280-2
Rauschenbach, B., Hohmuth, K. (1989) Preparation of thin superconducting Yî—¸Baî—¸Cu oxide films by ion beam mixing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 648-651 doi:10.1016/0168-583x(89)90867-7
Ogata, K., Andoh, Y., Kamijo, E. (1989) Properties of aluminum nitride films by an ion beam and vapor deposition method. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 178-181 doi:10.1016/0168-583x(89)90766-0
Kobayashi, N., Tanoue, H. (1989) Nitrogen ion implantation into ZrN thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 746-749 doi:10.1016/0168-583x(89)90889-6
(1989) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). doi:10.1016/0168-583x(89)90727-1
Saito, K., Yabe, K., Nishimura, O. (1989) Electronic structure of superconducting MoN thin films produced by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 623-627 doi:10.1016/0168-583x(89)90862-8
(1989) Committees. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. doi:10.1016/0168-583x(89)90125-0
Namba, Susumu (1989) Focused ion beam processing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 504-510 doi:10.1016/0168-583x(89)90836-7
Morris, N., Sealy, B.J. (1989) Diffusion and activation mechanisms in ion-implanted GaAs. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 453-456 doi:10.1016/0168-583x(89)90824-0
Fujimura, Shuzo, Yano, Hiroshi, Konno, Jun'ichi (1989) Ion implantation change in the chemical structure of a resist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 809-812 doi:10.1016/0168-583x(89)90902-6
(1989) Calendar. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 36 (1). 99-102 doi:10.1016/0168-583x(89)90067-0
 
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