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Saito, Keisuke, Hayashi, Hidetaka, Nishikawa, Hiroyuki (2013) Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 284-287 doi:10.1016/j.nimb.2012.12.032

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Reference TypeJournal (article/letter/editorial)
TitleFabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsSaito, KeisukeAuthor
Hayashi, HidetakaAuthor
Nishikawa, HiroyukiAuthor
Year2013 (July)Volume306
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2012.12.032Search in ResearchGate
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Mindat Ref. ID5647588Long-form Identifiermindat:1:5:5647588:9
GUID0
Full ReferenceSaito, Keisuke, Hayashi, Hidetaka, Nishikawa, Hiroyuki (2013) Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 284-287 doi:10.1016/j.nimb.2012.12.032
Plain TextSaito, Keisuke, Hayashi, Hidetaka, Nishikawa, Hiroyuki (2013) Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 306. 284-287 doi:10.1016/j.nimb.2012.12.032
In(2013) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 306. Elsevier BV

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