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Ieshkin, A.E., Ermakov, Yu.A., Chernysh, V.S. (2015) Angular distributions of particles sputtered from multicomponent targets with gas cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 354. 226-229 doi:10.1016/j.nimb.2014.11.065

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Reference TypeJournal (article/letter/editorial)
TitleAngular distributions of particles sputtered from multicomponent targets with gas cluster ions
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsIeshkin, A.E.Author
Ermakov, Yu.A.Author
Chernysh, V.S.Author
Year2015 (July)Volume354
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2014.11.065Search in ResearchGate
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Mindat Ref. ID5651151Long-form Identifiermindat:1:5:5651151:6
GUID0
Full ReferenceIeshkin, A.E., Ermakov, Yu.A., Chernysh, V.S. (2015) Angular distributions of particles sputtered from multicomponent targets with gas cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 354. 226-229 doi:10.1016/j.nimb.2014.11.065
Plain TextIeshkin, A.E., Ermakov, Yu.A., Chernysh, V.S. (2015) Angular distributions of particles sputtered from multicomponent targets with gas cluster ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 354. 226-229 doi:10.1016/j.nimb.2014.11.065
In(2015) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 354. Elsevier BV

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