Wang, Bo, Su, Shi-Chen, He, Miao, Chen, Hong, Wu, Wen-Bo, Zhang, Wei-Wei, Wang, Qiao, Chen, Yu-Long, Gao, You, Zhang, Li, Zhu, Ke-Bao, Lei, Yan (2013) Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching. Chinese Physics B, 22. 106802pp. doi:10.1088/1674-1056/22/10/106802
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching | ||
| Journal | Chinese Physics B | ||
| Authors | Wang, Bo | Author | |
| Su, Shi-Chen | Author | ||
| He, Miao | Author | ||
| Chen, Hong | Author | ||
| Wu, Wen-Bo | Author | ||
| Zhang, Wei-Wei | Author | ||
| Wang, Qiao | Author | ||
| Chen, Yu-Long | Author | ||
| Gao, You | Author | ||
| Zhang, Li | Author | ||
| Zhu, Ke-Bao | Author | ||
| Lei, Yan | Author | ||
| Year | 2013 (October) | Volume | 22 |
| Publisher | IOP Publishing | ||
| DOI | doi:10.1088/1674-1056/22/10/106802Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6003105 | Long-form Identifier | mindat:1:5:6003105:3 |
| GUID | 0 | ||
| Full Reference | Wang, Bo, Su, Shi-Chen, He, Miao, Chen, Hong, Wu, Wen-Bo, Zhang, Wei-Wei, Wang, Qiao, Chen, Yu-Long, Gao, You, Zhang, Li, Zhu, Ke-Bao, Lei, Yan (2013) Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching. Chinese Physics B, 22. 106802pp. doi:10.1088/1674-1056/22/10/106802 | ||
| Plain Text | Wang, Bo, Su, Shi-Chen, He, Miao, Chen, Hong, Wu, Wen-Bo, Zhang, Wei-Wei, Wang, Qiao, Chen, Yu-Long, Gao, You, Zhang, Li, Zhu, Ke-Bao, Lei, Yan (2013) Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching. Chinese Physics B, 22. 106802pp. doi:10.1088/1674-1056/22/10/106802 | ||
| In | (n.d.) Chinese Physics B Vol. 22. IOP Publishing | ||
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