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Tian, Li-Xin, Zhang, Feng, Shen, Zhan-Wei, Yan, Guo-Guo, Liu, Xing-Fang, Zhao, Wan-Shun, Wang, Lei, Sun, Guo-Sheng, Zeng, Yi-Ping (2016) Influences of annealing on structural and compositional properties of Al 2 O 3 thin films grown on 4H–SiC by atomic layer deposition. Chinese Physics B, 25. 128104pp. doi:10.1088/1674-1056/25/12/128104

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Reference TypeJournal (article/letter/editorial)
TitleInfluences of annealing on structural and compositional properties of Al 2 O 3 thin films grown on 4H–SiC by atomic layer deposition
JournalChinese Physics B
AuthorsTian, Li-XinAuthor
Zhang, FengAuthor
Shen, Zhan-WeiAuthor
Yan, Guo-GuoAuthor
Liu, Xing-FangAuthor
Zhao, Wan-ShunAuthor
Wang, LeiAuthor
Sun, Guo-ShengAuthor
Zeng, Yi-PingAuthor
Year2016 (December)Volume25
PublisherIOP Publishing
DOIdoi:10.1088/1674-1056/25/12/128104Search in ResearchGate
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Mindat Ref. ID6007005Long-form Identifiermindat:1:5:6007005:2
GUID0
Full ReferenceTian, Li-Xin, Zhang, Feng, Shen, Zhan-Wei, Yan, Guo-Guo, Liu, Xing-Fang, Zhao, Wan-Shun, Wang, Lei, Sun, Guo-Sheng, Zeng, Yi-Ping (2016) Influences of annealing on structural and compositional properties of Al 2 O 3 thin films grown on 4H–SiC by atomic layer deposition. Chinese Physics B, 25. 128104pp. doi:10.1088/1674-1056/25/12/128104
Plain TextTian, Li-Xin, Zhang, Feng, Shen, Zhan-Wei, Yan, Guo-Guo, Liu, Xing-Fang, Zhao, Wan-Shun, Wang, Lei, Sun, Guo-Sheng, Zeng, Yi-Ping (2016) Influences of annealing on structural and compositional properties of Al 2 O 3 thin films grown on 4H–SiC by atomic layer deposition. Chinese Physics B, 25. 128104pp. doi:10.1088/1674-1056/25/12/128104
In(n.d.) Chinese Physics B Vol. 25. IOP Publishing

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