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Williams, John D., Schmidt, C., Serkland, D. (2010) Processing advances in transparent Foturan® MEMS. Applied Physics A, 99. 777-782 doi:10.1007/s00339-010-5721-1

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Reference TypeJournal (article/letter/editorial)
TitleProcessing advances in transparent Foturan® MEMS
JournalApplied Physics A
AuthorsWilliams, John D.Author
Schmidt, C.Author
Serkland, D.Author
Year2010 (June)Volume99
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/s00339-010-5721-1Search in ResearchGate
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Mindat Ref. ID6014507Long-form Identifiermindat:1:5:6014507:3
GUID0
Full ReferenceWilliams, John D., Schmidt, C., Serkland, D. (2010) Processing advances in transparent Foturan® MEMS. Applied Physics A, 99. 777-782 doi:10.1007/s00339-010-5721-1
Plain TextWilliams, John D., Schmidt, C., Serkland, D. (2010) Processing advances in transparent Foturan® MEMS. Applied Physics A, 99. 777-782 doi:10.1007/s00339-010-5721-1
In(2010) Applied Physics A Vol. 99. Springer Science and Business Media LLC

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