Wada, Takao (1988) Electron beam oxidation of semiconductors (one mechanism of electron beam processes). Applied Physics Letters, 52 (13). 1056-1058 doi:10.1063/1.99209
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Electron beam oxidation of semiconductors (one mechanism of electron beam processes) | ||
Journal | Applied Physics Letters | ||
Authors | Wada, Takao | Author | |
Year | 1988 (March 28) | Volume | 52 |
Issue | 13 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.99209Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8482617 | Long-form Identifier | mindat:1:5:8482617:4 |
GUID | 0 | ||
Full Reference | Wada, Takao (1988) Electron beam oxidation of semiconductors (one mechanism of electron beam processes). Applied Physics Letters, 52 (13). 1056-1058 doi:10.1063/1.99209 | ||
Plain Text | Wada, Takao (1988) Electron beam oxidation of semiconductors (one mechanism of electron beam processes). Applied Physics Letters, 52 (13). 1056-1058 doi:10.1063/1.99209 | ||
In | (1988, March) Applied Physics Letters Vol. 52 (13) AIP Publishing |
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