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Ohno, H., Ishii, H., Matsuzaki, K., Hasegawa, H. (1989) Self‐limiting deposition of Ga on a GaAs surface by thermal decomposition of diethylgalliumchloride observed by x‐ray photoelectron spectroscopy. Applied Physics Letters, 54 (12). 1124-1126 doi:10.1063/1.100776

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Reference TypeJournal (article/letter/editorial)
TitleSelf‐limiting deposition of Ga on a GaAs surface by thermal decomposition of diethylgalliumchloride observed by x‐ray photoelectron spectroscopy
JournalApplied Physics Letters
AuthorsOhno, H.Author
Ishii, H.Author
Matsuzaki, K.Author
Hasegawa, H.Author
Year1989 (March 20)Volume54
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.100776Search in ResearchGate
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Mindat Ref. ID8486051Long-form Identifiermindat:1:5:8486051:2
GUID0
Full ReferenceOhno, H., Ishii, H., Matsuzaki, K., Hasegawa, H. (1989) Self‐limiting deposition of Ga on a GaAs surface by thermal decomposition of diethylgalliumchloride observed by x‐ray photoelectron spectroscopy. Applied Physics Letters, 54 (12). 1124-1126 doi:10.1063/1.100776
Plain TextOhno, H., Ishii, H., Matsuzaki, K., Hasegawa, H. (1989) Self‐limiting deposition of Ga on a GaAs surface by thermal decomposition of diethylgalliumchloride observed by x‐ray photoelectron spectroscopy. Applied Physics Letters, 54 (12). 1124-1126 doi:10.1063/1.100776
In(1989, March) Applied Physics Letters Vol. 54 (12) AIP Publishing


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