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Taghizadeh, M. R., Wilson, J. I. B., Turunen, J., Vasara, A., Westerholm, J. (1989) Optimization and fabrication of grating beamsplitters in silicon nitride. Applied Physics Letters, 54 (16). 1492-1494 doi:10.1063/1.101331

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Reference TypeJournal (article/letter/editorial)
TitleOptimization and fabrication of grating beamsplitters in silicon nitride
JournalApplied Physics Letters
AuthorsTaghizadeh, M. R.Author
Wilson, J. I. B.Author
Turunen, J.Author
Vasara, A.Author
Westerholm, J.Author
Year1989 (April 17)Volume54
Issue16
PublisherAIP Publishing
DOIdoi:10.1063/1.101331Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8486304Long-form Identifiermindat:1:5:8486304:1
GUID0
Full ReferenceTaghizadeh, M. R., Wilson, J. I. B., Turunen, J., Vasara, A., Westerholm, J. (1989) Optimization and fabrication of grating beamsplitters in silicon nitride. Applied Physics Letters, 54 (16). 1492-1494 doi:10.1063/1.101331
Plain TextTaghizadeh, M. R., Wilson, J. I. B., Turunen, J., Vasara, A., Westerholm, J. (1989) Optimization and fabrication of grating beamsplitters in silicon nitride. Applied Physics Letters, 54 (16). 1492-1494 doi:10.1063/1.101331
In(1989, April) Applied Physics Letters Vol. 54 (16) AIP Publishing

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Taghizadeh, M.R., Wilson, J.I.B., Turunen, J., Vasara, A., Westerholm, J. (1989) Amorphous silicon nitride optical grating beam splitters. Journal of Non-Crystalline Solids, 115 (1) 165-167 doi:10.1016/0022-3093(89)90393-1
Turunen, J, Vasara, A, Westerholm, J, Jin, G, Salin, A (1988) Optimisation and fabrication of grating beamsplitters. Journal of Physics D: Applied Physics, 21. doi:10.1088/0022-3727/21/10s/029
Taghizadeh, M. R., Turunen, J., Vasara, A. (1990) Binary phase wave fronts reconstructed from internal reflection metal on glass holograms. Applied Physics Letters, 56 (13). 1195-1197 doi:10.1063/1.102557
Vasara, Antti, Taghizadeh, Mohammad R., Turunen, Jari, Westerholm, Jan, Noponen, Eero, Ichikawa, Hiroyuki, Miller, J. Michael, Jaakkola, Tommi, Kuisma, Sirpa (1992) Binary surface-relief gratings for array illumination in digital optics. Applied Optics, 31. 3320pp. doi:10.1364/ao.31.003320
Robertson, Brian, Taghizadeh, Mohammad R., Turunen, Jari, Vasara, Antti (1990) Fabrication of space invariant fanout components in dichromated gelatin. Applied Optics, 29. 1134pp. doi:10.1364/ao.29.001134
Miller, J. Michael, Taghizadeh, Mohammad R., Turunen, Jari, Ross, Neil (1993) Multilevel-grating array generators: fabrication error analysis and experiments. Applied Optics, 32. 2519pp. doi:10.1364/ao.32.002519
Robertson, Brian, Turunen, Jari, Ichikawa, Hiroyuki, Miller, J. Michael, Taghizadeh, Mohammad R., Vasara, Antti (1991) Hybrid kinoform fanout holograms in dichromated gelatin. Applied Optics, 30. 3711pp. doi:10.1364/ao.30.003711
Jousse, D., Kanicki, J., Stathis, J. H. (1989) Observation of multiple silicon dangling bond configurations in silicon nitride. Applied Physics Letters, 54 (11). 1043-1045 doi:10.1063/1.101558
Adiga, V. P., Ilic, B., Barton, R. A., Wilson-Rae, I., Craighead, H. G., Parpia, J. M. (2011) Modal dependence of dissipation in silicon nitride drum resonators. Applied Physics Letters, 99 (25). 253103pp. doi:10.1063/1.3671150
Donnelly, V. M., Mucha, J. A. (1989) Direct pattern replication in plasma deposited silicon nitride films by 193 nm ArF excimer laser‐induced suppression of etching. Applied Physics Letters, 54 (16). 1567-1569 doi:10.1063/1.101315
Hattori, R., Shirafuji, J. (1989) Longitudinal electron drift mobility of hydrogenated amorphous silicon/silicon nitride multilayer structures revealed by time‐of‐flight measurements. Applied Physics Letters, 54 (12). 1118-1120 doi:10.1063/1.101478
 
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