Vote for your favorite mineral in #MinCup25! - Kosmochlor vs. Azurite
It's a battle of green vs blue as rare but vibrant chromium-bearing kosmochlor up against the deep blue copper alteration mineral azurite.
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Alers, G. B., Werder, D. J., Chabal, Y., Lu, H. C., Gusev, E. P., Garfunkel, E., Gustafsson, T., Urdahl, R. S. (1998) Intermixing at the tantalum oxide/silicon interface in gate dielectric structures. Applied Physics Letters, 73 (11). 1517-1519 doi:10.1063/1.122191

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleIntermixing at the tantalum oxide/silicon interface in gate dielectric structures
JournalApplied Physics Letters
AuthorsAlers, G. B.Author
Werder, D. J.Author
Chabal, Y.Author
Lu, H. C.Author
Gusev, E. P.Author
Garfunkel, E.Author
Gustafsson, T.Author
Urdahl, R. S.Author
Year1998 (September 14)Volume73
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.122191Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8521811Long-form Identifiermindat:1:5:8521811:4
GUID0
Full ReferenceAlers, G. B., Werder, D. J., Chabal, Y., Lu, H. C., Gusev, E. P., Garfunkel, E., Gustafsson, T., Urdahl, R. S. (1998) Intermixing at the tantalum oxide/silicon interface in gate dielectric structures. Applied Physics Letters, 73 (11). 1517-1519 doi:10.1063/1.122191
Plain TextAlers, G. B., Werder, D. J., Chabal, Y., Lu, H. C., Gusev, E. P., Garfunkel, E., Gustafsson, T., Urdahl, R. S. (1998) Intermixing at the tantalum oxide/silicon interface in gate dielectric structures. Applied Physics Letters, 73 (11). 1517-1519 doi:10.1063/1.122191
In(1998, September) Applied Physics Letters Vol. 73 (11) AIP Publishing

See Also

These are possibly similar items as determined by title/reference text matching only.

Gusev, E. P., Lu, H. C., Gustafsson, T., Garfunkel, E., Green, M. L., Brasen, D. (1997) The composition of ultrathin silicon oxynitrides thermally grown in nitric oxide. Journal of Applied Physics, 82 (2). 896-898 doi:10.1063/1.365858
Lu, H. C., Gusev, E. P., Gustafsson, T., Garfunkel, E., Green, M. L., Brasen, D., Feldman, L. C. (1996) High resolution ion scattering study of silicon oxynitridation. Applied Physics Letters, 69 (18). 2713-2715 doi:10.1063/1.117687
Lu, H. C., Gustafsson, T., Gusev, E. P., Garfunkel, E. (1995) An isotopic labeling study of the growth of thin oxide films on Si(100). Applied Physics Letters, 67 (12). 1742-1744 doi:10.1063/1.115035
Green, M. L., Sorsch, T., Feldman, L. C., Lennard, W. N., Gusev, E. P., Garfunkel, E., Lu, H. C., Gustafsson, T. (1997) Ultrathin SiOxNy by rapid thermal heating of silicon in N2 at T=760–1050 °C. Applied Physics Letters, 71 (20). 2978-2980 doi:10.1063/1.120235
Lu, H.C., Gusev, E., Yasuda, N., Green, M., Alers, G., Garfunkel, E., Gustafsson, T. (2000) The growth chemistry and interfacial properties of silicon oxynitride and metal oxide ultrathin films on silicon. Applied Surface Science, 166. 465-468 doi:10.1016/s0169-4332(00)00475-x
Lu, H. C., Gusev, E. P., Gustafsson, T., Garfunkel, E. (1997) Effect of near-interfacial nitrogen on the oxidation behavior of ultrathin silicon oxynitrides. Journal of Applied Physics, 81 (10). 6992-6995 doi:10.1063/1.365264
Lu, H. C., Gusev, E. P., Garfunkel, E., Busch, B. W., Gustafsson, T., Sorsch, T. W., Green, M. L. (2000) Isotopic labeling studies of interactions of nitric oxide and nitrous oxide with ultrathin oxynitride layers on silicon. Journal of Applied Physics, 87 (3). 1550-1555 doi:10.1063/1.372048
Dhar, S., Song, Y. W., Feldman, L. C., Isaacs-Smith, T., Tin, C. C., Williams, J. R., Chung, G., Nishimura, T., Starodub, D., Gustafsson, T., Garfunkel, E. (2004) Effect of nitric oxide annealing on the interface trap density near the conduction bandedge of 4H–SiC at the oxide/(112̄0) 4H–SiC interface. Applied Physics Letters, 84 (9). 1498-1500 doi:10.1063/1.1651325
Alers, G. B., Fleming, R. M., Wong, Y. H., Dennis, B., Pinczuk, A., Redinbo, G., Urdahl, R., Ong, E., Hasan, Z. (1998) Nitrogen plasma annealing for low temperature Ta2O5 films. Applied Physics Letters, 72 (11). 1308-1310 doi:10.1063/1.120569
STARODUB, D., GUSEV, E. P., GARFUNKEL, E., GUSTAFSSON, T. (1999) SILICON OXIDE DECOMPOSITION AND DESORPTION DURING THE THERMAL OXIDATION OF SILICON. Surface Review and Letters, 6 (1). 45-52 doi:10.1142/s0218625x99000081
Gusev, E. P., Lu, H. C., Garfunkel, E., Gustafsson, T., Green, M. L., Brasen, D., Lennard, W. N. (1998) Nitrogen engineering of ultrathin oxynitrides by a thermal NO/O2/NO process. Journal of Applied Physics, 84 (5). 2980-2982 doi:10.1063/1.368435
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: September 9, 2025 16:26:30
Go to top of page