Hall, Neal A., Degertekin, F. Levent (2002) Integrated optical interferometric detection method for micromachined capacitive acoustic transducers. Applied Physics Letters, 80 (20). 3859-3861 doi:10.1063/1.1480486
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Integrated optical interferometric detection method for micromachined capacitive acoustic transducers | ||
Journal | Applied Physics Letters | ||
Authors | Hall, Neal A. | Author | |
Degertekin, F. Levent | Author | ||
Year | 2002 (May 20) | Volume | 80 |
Issue | 20 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.1480486Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8532067 | Long-form Identifier | mindat:1:5:8532067:7 |
GUID | 0 | ||
Full Reference | Hall, Neal A., Degertekin, F. Levent (2002) Integrated optical interferometric detection method for micromachined capacitive acoustic transducers. Applied Physics Letters, 80 (20). 3859-3861 doi:10.1063/1.1480486 | ||
Plain Text | Hall, Neal A., Degertekin, F. Levent (2002) Integrated optical interferometric detection method for micromachined capacitive acoustic transducers. Applied Physics Letters, 80 (20). 3859-3861 doi:10.1063/1.1480486 | ||
In | (2002, May) Applied Physics Letters Vol. 80 (20) AIP Publishing |
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