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Kobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2002) Dopant profiling on semiconducting sample by scanning capacitance force microscopy. Applied Physics Letters, 81 (14). 2629-2631 doi:10.1063/1.1510582

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Reference TypeJournal (article/letter/editorial)
TitleDopant profiling on semiconducting sample by scanning capacitance force microscopy
JournalApplied Physics Letters
AuthorsKobayashi, KeiAuthor
Yamada, HirofumiAuthor
Matsushige, KazumiAuthor
Year2002 (September 30)Volume81
Issue14
PublisherAIP Publishing
DOIdoi:10.1063/1.1510582Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8533178Long-form Identifiermindat:1:5:8533178:9
GUID0
Full ReferenceKobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2002) Dopant profiling on semiconducting sample by scanning capacitance force microscopy. Applied Physics Letters, 81 (14). 2629-2631 doi:10.1063/1.1510582
Plain TextKobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2002) Dopant profiling on semiconducting sample by scanning capacitance force microscopy. Applied Physics Letters, 81 (14). 2629-2631 doi:10.1063/1.1510582
In(2002, September) Applied Physics Letters Vol. 81 (14) AIP Publishing

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Kimura, Kenjiro, Kobayashi, Kei, Matsushige, Kazumi, Usuda, Koji, Yamada, Hirofumi (2007) Noncontact-mode scanning capacitance force microscopy towards quantitative two-dimensional carrier profiling on semiconductor devices. Applied Physics Letters, 90 (8). 83101pp. doi:10.1063/1.2454728
Fukuma, Takeshi, Kobayashi, Kei, Matsushige, Kazumi, Yamada, Hirofumi (2005) True molecular resolution in liquid by frequency-modulation atomic force microscopy. Applied Physics Letters, 86 (19). 193108pp. doi:10.1063/1.1925780
Fukuma, Takeshi, Kobayashi, Kei, Matsushige, Kazumi, Yamada, Hirofumi (2005) True atomic resolution in liquid by frequency-modulation atomic force microscopy. Applied Physics Letters, 87 (3). 34101pp. doi:10.1063/1.1999856
Nishio, Taichi, Miyato, Yuji, Kobayashi, Kei, Matsushige, Kazumi, Yamada, Hirofumi (2008) Piezoresistive properties of carbon nanotubes under radial force investigated by atomic force microscopy. Applied Physics Letters, 92 (6). 63117pp. doi:10.1063/1.2857480
Ito, Masanao, Kobayashi, Kei, Miyato, Yuji, Matsushige, Kazumi, Yamada, Hirofumi (2013) Local potential profiling of operating carbon nanotube transistor using frequency-modulation high-frequency electrostatic force microscopy. Applied Physics Letters, 102 (1). 13115pp. doi:10.1063/1.4774265
Fukuma, Takeshi, Ichii, Takashi, Kobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2005) True-molecular resolution imaging by frequency modulation atomic force microscopy in various environments. Applied Physics Letters, 86 (3). 34103pp. doi:10.1063/1.1852721
Suzuki, Kazuhiro, Kobayashi, Kei, Labuda, Aleksander, Matsushige, Kazumi, Yamada, Hirofumi (2014) Accurate formula for dissipative interaction in frequency modulation atomic force microscopy. Applied Physics Letters, 105 (23). 233105pp. doi:10.1063/1.4903484
Kimura, K., Kobayashi, K., Yamada, H., Matsushige, K. (2003) Two-dimensional dopant profiling by scanning capacitance force microscopy. Applied Surface Science, 210. 93-98 doi:10.1016/s0169-4332(02)01486-1
Kobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2002) Dynamic force microscopy using FM detection in various environments. Applied Surface Science, 188. 430-434 doi:10.1016/s0169-4332(01)00971-0
Kobayashi, Kei, Yamada, Hirofumi, Matsushige, Kazumi (2009) Frequency noise in frequency modulation atomic force microscopy. Review of Scientific Instruments, 80 (4). 43708pp. doi:10.1063/1.3120913
Ichii, Takashi, Fukuma, Takeshi, Yoda, Tadashi, Kobayashi, Kei, Matsushige, Kazumi, Yamada, Hirofumi (2010) Submolecular-scale Investigations on metal-phthalocyanine monolayers by frequency modulation atomic force microscopy. Journal of Applied Physics, 107 (2). 24315pp. doi:10.1063/1.3284094
 
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