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Xia, Qiangfei, Keimel, Chris, Ge, Haixiong, Yu, Zhaoning, Wu, Wei, Chou, Stephen Y. (2003) Ultrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography. Applied Physics Letters, 83 (21). 4417-4419 doi:10.1063/1.1630162

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Reference TypeJournal (article/letter/editorial)
TitleUltrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography
JournalApplied Physics Letters
AuthorsXia, QiangfeiAuthor
Keimel, ChrisAuthor
Ge, HaixiongAuthor
Yu, ZhaoningAuthor
Wu, WeiAuthor
Chou, Stephen Y.Author
Year2003 (November 24)Volume83
Issue21
PublisherAIP Publishing
DOIdoi:10.1063/1.1630162Search in ResearchGate
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Mindat Ref. ID8537046Long-form Identifiermindat:1:5:8537046:9
GUID0
Full ReferenceXia, Qiangfei, Keimel, Chris, Ge, Haixiong, Yu, Zhaoning, Wu, Wei, Chou, Stephen Y. (2003) Ultrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography. Applied Physics Letters, 83 (21). 4417-4419 doi:10.1063/1.1630162
Plain TextXia, Qiangfei, Keimel, Chris, Ge, Haixiong, Yu, Zhaoning, Wu, Wei, Chou, Stephen Y. (2003) Ultrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography. Applied Physics Letters, 83 (21). 4417-4419 doi:10.1063/1.1630162
In(2003, November) Applied Physics Letters Vol. 83 (21) AIP Publishing

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Wu, Wei, Gu, Jian, Ge, Haixiong, Keimel, Christopher, Chou, Stephen Y. (2003) Room-temperature Si single-electron memory fabricated by nanoimprint lithography. Applied Physics Letters, 83 (11). 2268-2270 doi:10.1063/1.1610814
Austin, Michael D., Ge, Haixiong, Wu, Wei, Li, Mingtao, Yu, Zhaoning, Wasserman, D., Lyon, S. A., Chou, Stephen Y. (2004) Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography. Applied Physics Letters, 84 (26). 5299-5301 doi:10.1063/1.1766071
Cui, Bo, Yu, Zhaoning, Ge, Haixiong, Chou, Stephen Y. (2007) Large area 50nm period grating by multiple nanoimprint lithography and spatial frequency doubling. Applied Physics Letters, 90 (4). 43118pp. doi:10.1063/1.2390652
Li, Mingtao, Chen, Lei, Chou, Stephen Y. (2001) Direct three-dimensional patterning using nanoimprint lithography. Applied Physics Letters, 78 (21). 3322-3324 doi:10.1063/1.1375006
Yu, Zhaoning, Deshpande, Paru, Wu, Wei, Wang, Jian, Chou, Stephen Y. (2000) Reflective polarizer based on a stacked double-layer subwavelength metal grating structure fabricated using nanoimprint lithography. Applied Physics Letters, 77 (7). 927pp. doi:10.1063/1.1288674
Yu, Zhaoning, Gao, He, Chou, Stephen Y. (2004) In situ real time process characterization in nanoimprint lithography using time-resolved diffractive scatterometry. Applied Physics Letters, 85 (18). 4166-4168 doi:10.1063/1.1811396
Zhang, Wei, Chou, Stephen Y. (2003) Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels. Applied Physics Letters, 83 (8). 1632-1634 doi:10.1063/1.1600505
Xia, Qiangfei, Yu, Zhaoning, Gao, He, Chou, Stephen Y. (2006) In situ real time monitoring of nanosecond imprint process. Applied Physics Letters, 89 (7). 73107pp. doi:10.1063/1.2335952
Yu, Zhaoning, Schablitsky, Steven J., Chou, S. Y. (1999) Nanoscale GaAs metal–semiconductor–metal photodetectors fabricated using nanoimprint lithography. Applied Physics Letters, 74 (16). 2381-2383 doi:10.1063/1.123858
Chou, Stephen Y., Keimel, Chris, Gu, Jian (2002) Ultrafast and direct imprint of nanostructures in silicon. Nature, 417 (6891). 835-837 doi:10.1038/nature00792
Zhang, Wei, Chou, Stephen Y. (2001) Multilevel nanoimprint lithography with submicron alignment over 4 in. Si wafers. Applied Physics Letters, 79 (6). 845-847 doi:10.1063/1.1391400
 
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