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Rasmussen, P. A., Hansen, O., Boisen, A. (2005) Cantilever surface stress sensors with single-crystalline silicon piezoresistors. Applied Physics Letters, 86 (20). 203502pp. doi:10.1063/1.1900299

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Reference TypeJournal (article/letter/editorial)
TitleCantilever surface stress sensors with single-crystalline silicon piezoresistors
JournalApplied Physics Letters
AuthorsRasmussen, P. A.Author
Hansen, O.Author
Boisen, A.Author
Year2005 (May 16)Volume86
Issue20
PublisherAIP Publishing
DOIdoi:10.1063/1.1900299Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8542876Long-form Identifiermindat:1:5:8542876:6
GUID0
Full ReferenceRasmussen, P. A., Hansen, O., Boisen, A. (2005) Cantilever surface stress sensors with single-crystalline silicon piezoresistors. Applied Physics Letters, 86 (20). 203502pp. doi:10.1063/1.1900299
Plain TextRasmussen, P. A., Hansen, O., Boisen, A. (2005) Cantilever surface stress sensors with single-crystalline silicon piezoresistors. Applied Physics Letters, 86 (20). 203502pp. doi:10.1063/1.1900299
In(2005, May) Applied Physics Letters Vol. 86 (20) AIP Publishing

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Jensenius, Henriette, Thaysen, Jacob, Rasmussen, Anette A., Veje, Lars H., Hansen, Ole, Boisen, Anja (2000) A microcantilever-based alcohol vapor sensor-application and response model. Applied Physics Letters, 76 (18). 2615-2617 doi:10.1063/1.126426
Huang, Y., Dasgupta, A., Gordijn, A., Finger, F., Carius, R. (2007) Highly transparent microcrystalline silicon carbide grown with hot wire chemical vapor deposition as window layers in n-i-p microcrystalline silicon solar cells. Applied Physics Letters, 90 (20). 203502pp. doi:10.1063/1.2739335
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