Lee, Jae-Hwang, Kim, Chang-Hwan, Kim, Yong-Sung, Ho, Kai-Ming, Constant, Kristen, Leung, Wai, Oh, Cha-Hwan (2005) Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography. Applied Physics Letters, 86 (20). 204101pp. doi:10.1063/1.1927268
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography | ||
| Journal | Applied Physics Letters | ||
| Authors | Lee, Jae-Hwang | Author | |
| Kim, Chang-Hwan | Author | ||
| Kim, Yong-Sung | Author | ||
| Ho, Kai-Ming | Author | ||
| Constant, Kristen | Author | ||
| Leung, Wai | Author | ||
| Oh, Cha-Hwan | Author | ||
| Year | 2005 (May 16) | Volume | 86 |
| Issue | 20 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.1927268Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8542913 | Long-form Identifier | mindat:1:5:8542913:6 |
| GUID | 0 | ||
| Full Reference | Lee, Jae-Hwang, Kim, Chang-Hwan, Kim, Yong-Sung, Ho, Kai-Ming, Constant, Kristen, Leung, Wai, Oh, Cha-Hwan (2005) Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography. Applied Physics Letters, 86 (20). 204101pp. doi:10.1063/1.1927268 | ||
| Plain Text | Lee, Jae-Hwang, Kim, Chang-Hwan, Kim, Yong-Sung, Ho, Kai-Ming, Constant, Kristen, Leung, Wai, Oh, Cha-Hwan (2005) Diffracted moiré fringes as analysis and alignment tools for multilayer fabrication in soft lithography. Applied Physics Letters, 86 (20). 204101pp. doi:10.1063/1.1927268 | ||
| In | (2005, May) Applied Physics Letters Vol. 86 (20) AIP Publishing | ||
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