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Tao, Y., Nishimura, H., Fujioka, S., Sunahara, A., Nakai, M., Okuno, T., Ueda, N., Nishihara, K., Miyanaga, N., Izawa, Y. (2005) Characterization of density profile of laser-produced Sn plasma for 13.5nm extreme ultraviolet source. Applied Physics Letters, 86 (20). 201501pp. doi:10.1063/1.1931825

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Reference TypeJournal (article/letter/editorial)
TitleCharacterization of density profile of laser-produced Sn plasma for 13.5nm extreme ultraviolet source
JournalApplied Physics Letters
AuthorsTao, Y.Author
Nishimura, H.Author
Fujioka, S.Author
Sunahara, A.Author
Nakai, M.Author
Okuno, T.Author
Ueda, N.Author
Nishihara, K.Author
Miyanaga, N.Author
Izawa, Y.Author
Year2005 (May 16)Volume86
Issue20
PublisherAIP Publishing
DOIdoi:10.1063/1.1931825Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8542969Long-form Identifiermindat:1:5:8542969:5
GUID0
Full ReferenceTao, Y., Nishimura, H., Fujioka, S., Sunahara, A., Nakai, M., Okuno, T., Ueda, N., Nishihara, K., Miyanaga, N., Izawa, Y. (2005) Characterization of density profile of laser-produced Sn plasma for 13.5nm extreme ultraviolet source. Applied Physics Letters, 86 (20). 201501pp. doi:10.1063/1.1931825
Plain TextTao, Y., Nishimura, H., Fujioka, S., Sunahara, A., Nakai, M., Okuno, T., Ueda, N., Nishihara, K., Miyanaga, N., Izawa, Y. (2005) Characterization of density profile of laser-produced Sn plasma for 13.5nm extreme ultraviolet source. Applied Physics Letters, 86 (20). 201501pp. doi:10.1063/1.1931825
In(2005, May) Applied Physics Letters Vol. 86 (20) AIP Publishing

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Tao, Y., Nishimura, H., Okuno, T., Fujioka, S., Ueda, N., Nakai, M., Nagai, K., Norimatsu, T., Miyanaga, N., Nishihara, K., Izawa, Y. (2005) Dynamic imaging of 13.5 nm extreme ultraviolet emission from laser-produced Sn plasmas. Applied Physics Letters, 87 (24). 241502pp. doi:10.1063/1.2139990
Shimada, Y., Nishimura, H., Nakai, M., Hashimoto, K., Yamaura, M., Tao, Y., Shigemori, K., Okuno, T., Nishihara, K., Kawamura, T., Sunahara, A., Nishikawa, T., Sasaki, A., Nagai, K., Norimatsu, T., Fujioka, S., Uchida, S., Miyanaga, N., Izawa, Y., Yamanaka, C. (2005) Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams. Applied Physics Letters, 86 (5). 51501pp. doi:10.1063/1.1856697
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Tao, Y., Nakai, M., Nishimura, H., Fujioka, S., Okuno, T., Fujiwara, T., Ueda, N., Miyanaga, N., Izawa, Y. (2004) Temporally resolved Schwarzschild microscope for the characterization of extreme ultraviolet emission in laser-produced plasmas. Review of Scientific Instruments, 75 (12). 5173-5176 doi:10.1063/1.1818891
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White, J., O’Sullivan, G., Zakharov, S., Choi, P., Zakharov, V., Nishimura, H., Fujioka, S., Nishihara, K. (2008) Tin laser-produced plasma source modeling at 13.5nm for extreme ultraviolet lithography. Applied Physics Letters, 92 (15). 151501pp. doi:10.1063/1.2906901
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