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Zhang, Z., Zhang, S.-L., Östling, M., Lu, J. (2006) Robust, scalable self-aligned platinum silicide process. Applied Physics Letters, 88 (14). 142114pp. doi:10.1063/1.2194313

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Reference TypeJournal (article/letter/editorial)
TitleRobust, scalable self-aligned platinum silicide process
JournalApplied Physics Letters
AuthorsZhang, Z.Author
Zhang, S.-L.Author
Östling, M.Author
Lu, J.Author
Year2006 (April 3)Volume88
Issue14
PublisherAIP Publishing
DOIdoi:10.1063/1.2194313Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8546972Long-form Identifiermindat:1:5:8546972:7
GUID0
Full ReferenceZhang, Z., Zhang, S.-L., Östling, M., Lu, J. (2006) Robust, scalable self-aligned platinum silicide process. Applied Physics Letters, 88 (14). 142114pp. doi:10.1063/1.2194313
Plain TextZhang, Z., Zhang, S.-L., Östling, M., Lu, J. (2006) Robust, scalable self-aligned platinum silicide process. Applied Physics Letters, 88 (14). 142114pp. doi:10.1063/1.2194313
In(2006, April) Applied Physics Letters Vol. 88 (14) AIP Publishing

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