Dube, Abhishek, Sharma, Manish, Ma, Paul F., Engstrom, J. R. (2006) Effects of interfacial organic layers on thin film nucleation in atomic layer deposition. Applied Physics Letters, 89 (16). 164108pp. doi:10.1063/1.2360902
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effects of interfacial organic layers on thin film nucleation in atomic layer deposition | ||
Journal | Applied Physics Letters | ||
Authors | Dube, Abhishek | Author | |
Sharma, Manish | Author | ||
Ma, Paul F. | Author | ||
Engstrom, J. R. | Author | ||
Year | 2006 (October 16) | Volume | 89 |
Issue | 16 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.2360902Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8550122 | Long-form Identifier | mindat:1:5:8550122:7 |
GUID | 0 | ||
Full Reference | Dube, Abhishek, Sharma, Manish, Ma, Paul F., Engstrom, J. R. (2006) Effects of interfacial organic layers on thin film nucleation in atomic layer deposition. Applied Physics Letters, 89 (16). 164108pp. doi:10.1063/1.2360902 | ||
Plain Text | Dube, Abhishek, Sharma, Manish, Ma, Paul F., Engstrom, J. R. (2006) Effects of interfacial organic layers on thin film nucleation in atomic layer deposition. Applied Physics Letters, 89 (16). 164108pp. doi:10.1063/1.2360902 | ||
In | (2006, October) Applied Physics Letters Vol. 89 (16) AIP Publishing |
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