Kubota, Tomohiro, Hashimoto, Takeshi, Ishikawa, Yasushi, Samukawa, Seiji, Miura, Atsushi, Uraoka, Yukiharu, Fuyuki, Takashi, Takeguchi, Masaki, Nishioka, Kensuke, Yamashita, Ichiro (2006) Charging and Coulomb staircase effects in silicon nanodisk structures fabricated by defect-free Cl neutral beam etching process. Applied Physics Letters, 89 (23). 233127pp. doi:10.1063/1.2404608
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Charging and Coulomb staircase effects in silicon nanodisk structures fabricated by defect-free Cl neutral beam etching process | ||
| Journal | Applied Physics Letters | ||
| Authors | Kubota, Tomohiro | Author | |
| Hashimoto, Takeshi | Author | ||
| Ishikawa, Yasushi | Author | ||
| Samukawa, Seiji | Author | ||
| Miura, Atsushi | Author | ||
| Uraoka, Yukiharu | Author | ||
| Fuyuki, Takashi | Author | ||
| Takeguchi, Masaki | Author | ||
| Nishioka, Kensuke | Author | ||
| Yamashita, Ichiro | Author | ||
| Year | 2006 (December 4) | Volume | 89 |
| Issue | 23 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2404608Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8551279 | Long-form Identifier | mindat:1:5:8551279:1 |
| GUID | 0 | ||
| Full Reference | Kubota, Tomohiro, Hashimoto, Takeshi, Ishikawa, Yasushi, Samukawa, Seiji, Miura, Atsushi, Uraoka, Yukiharu, Fuyuki, Takashi, Takeguchi, Masaki, Nishioka, Kensuke, Yamashita, Ichiro (2006) Charging and Coulomb staircase effects in silicon nanodisk structures fabricated by defect-free Cl neutral beam etching process. Applied Physics Letters, 89 (23). 233127pp. doi:10.1063/1.2404608 | ||
| Plain Text | Kubota, Tomohiro, Hashimoto, Takeshi, Ishikawa, Yasushi, Samukawa, Seiji, Miura, Atsushi, Uraoka, Yukiharu, Fuyuki, Takashi, Takeguchi, Masaki, Nishioka, Kensuke, Yamashita, Ichiro (2006) Charging and Coulomb staircase effects in silicon nanodisk structures fabricated by defect-free Cl neutral beam etching process. Applied Physics Letters, 89 (23). 233127pp. doi:10.1063/1.2404608 | ||
| In | (2006, December) Applied Physics Letters Vol. 89 (23) AIP Publishing | ||
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