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Tanaka, Yasunori, Morishita, Yu, Fushie, Shunsuke, Okunaga, Kyota, Uesugi, Yoshihiko (2007) Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing. Applied Physics Letters, 90 (7). 71502pp. doi:10.1063/1.2696885

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Reference TypeJournal (article/letter/editorial)
TitleGeneration of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing
JournalApplied Physics Letters
AuthorsTanaka, YasunoriAuthor
Morishita, YuAuthor
Fushie, ShunsukeAuthor
Okunaga, KyotaAuthor
Uesugi, YoshihikoAuthor
Year2007 (February 12)Volume90
Issue7
PublisherAIP Publishing
DOIdoi:10.1063/1.2696885Search in ResearchGate
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Mindat Ref. ID8555424Long-form Identifiermindat:1:5:8555424:7
GUID0
Full ReferenceTanaka, Yasunori, Morishita, Yu, Fushie, Shunsuke, Okunaga, Kyota, Uesugi, Yoshihiko (2007) Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing. Applied Physics Letters, 90 (7). 71502pp. doi:10.1063/1.2696885
Plain TextTanaka, Yasunori, Morishita, Yu, Fushie, Shunsuke, Okunaga, Kyota, Uesugi, Yoshihiko (2007) Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing. Applied Physics Letters, 90 (7). 71502pp. doi:10.1063/1.2696885
In(2007, February) Applied Physics Letters Vol. 90 (7) AIP Publishing

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Hata, Kazufumi, Tanaka, Yasunori, Nakano, Yusuke, Arai, Takashi, Uesugi, Yoshihiko, Ishijima, Tatsuo (2019) Polycrystalline diamond film fabrication using modulated inductively coupled thermal plasmas at different pressure conditions. Journal of Applied Physics, 126 (22). 223302pp. doi:10.1063/1.5124058
Tial, Mai Kai Suan, Irie, Hiromitsu, Maruyama, Yuji, Tanaka, Yasunori, Uesugi, Yoshihiko, Ishijima, Tatsuo (2016) Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing. Japanese Journal of Applied Physics, 55 (7) 7 doi:10.7567/jjap.55.07lb03
Tanaka, Yasunori (2006) Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar–N2pulse-modulated inductively coupled plasmas at atmospheric pressure. Journal of Physics D: Applied Physics, 39. 307-319 doi:10.1088/0022-3727/39/2/011
Tanaka, Yasunori, Muroya, Takafumi, Hayashi, Kouhei, Uesugi, Yoshihiko (2006) Simultaneous control of numerical enhancement of N atoms and decrease in heat flux into reaction chamber using Ar–N2 pulse-modulated induction thermal plasmas. Applied Physics Letters, 89 (3). 31501pp. doi:10.1063/1.2226994
Razzak, M. Abdur, Takamura, Shuichi, Uesugi, Yoshihiko (2004) Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas. Journal of Applied Physics, 96 (9). 4771-4776 doi:10.1063/1.1790066
Tanaka, Yasunori, Shimizu, Kotaro, Akashi, Keita, Onda, Kazuki, Uesugi, Yoshihiko, Ishijima, Tatsuo, Watanabe, Shu, Sueyasu, Shiori, Nakamura, Keitaro (2020) High rate synthesis of graphene-encapsulated silicon nanoparticles using pulse-modulated induction thermal plasmas with intermittent feedstock feeding. Japanese Journal of Applied Physics, 59. doi:10.35848/1347-4065/ab71db
Kai Suan Tial, Mai, Tanaka, Yasunori, Akao, Mika, Uesugi, Yoshihiko, Ishijima, Tatsuo (2016) Fundamental properties of a planar type of inductively coupled thermal plasma with current modulation. Journal of Physics D: Applied Physics, 49. 385204pp. doi:10.1088/0022-3727/49/38/385204
Ishijima, Tatsuo, Nosaka, Kohei, Tanaka, Yasunori, Uesugi, Yoshihiko, Goto, Yousuke, Horibe, Hideo (2013) A high-speed photoresist removal process using multibubble microwave plasma under a mixture of multiphase plasma environment. Applied Physics Letters, 103 (14). 142101pp. doi:10.1063/1.4823530
Kuraishi, Katsuya, Akao, Mika, Tanaka, Yasunori, Uesugi, Yoshihiko, Ishijima, Tatsuo (2013) Temperature Behavior in a Tandem Type of Modulated Induction Thermal Plasma for Materials Processings. Journal of Physics: Conference Series, 441. 12016pp. doi:10.1088/1742-6596/441/1/012016
Haruta, Yosuke, Fujimoto, Kenta, Horita, Sosuke, Tanaka, Yasunori, Uesugi, Yoshihiko, Ishijima, Tatsuo (2013) Time Evolution in Radiation Intensities of C2and H Spectra in Ar/CH4/H2Pulse Modulated Induction Thermal Plasmas for Diamond Film Deposition. Journal of Physics: Conference Series, 441. 12017pp. doi:10.1088/1742-6596/441/1/012017
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