Xu, Yang, Aluru, N. R. (2009) Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers. Applied Physics Letters, 95 (7). 73112pp. doi:10.1063/1.3211111
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers | ||
Journal | Applied Physics Letters | ||
Authors | Xu, Yang | Author | |
Aluru, N. R. | Author | ||
Year | 2009 (August 17) | Volume | 95 |
Issue | 7 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.3211111Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8581197 | Long-form Identifier | mindat:1:5:8581197:5 |
GUID | 0 | ||
Full Reference | Xu, Yang, Aluru, N. R. (2009) Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers. Applied Physics Letters, 95 (7). 73112pp. doi:10.1063/1.3211111 | ||
Plain Text | Xu, Yang, Aluru, N. R. (2009) Pull-in/out analysis of nano/microelectromechanical switches with defective oxide layers. Applied Physics Letters, 95 (7). 73112pp. doi:10.1063/1.3211111 | ||
In | (2009, August) Applied Physics Letters Vol. 95 (7) AIP Publishing |
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