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Yuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R. A., Najmabadi, F. (2010) Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas. Applied Physics Letters, 96 (26). 261501pp. doi:10.1063/1.3458696

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Reference TypeJournal (article/letter/editorial)
TitleHeating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas
JournalApplied Physics Letters
AuthorsYuspeh, S.Author
Sequoia, K. L.Author
Tao, Y.Author
Tillack, M. S.Author
Burdt, R. A.Author
Najmabadi, F.Author
Year2010 (June 28)Volume96
Issue26
PublisherAIP Publishing
DOIdoi:10.1063/1.3458696Search in ResearchGate
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Mindat Ref. ID8584733Long-form Identifiermindat:1:5:8584733:2
GUID0
Full ReferenceYuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R. A., Najmabadi, F. (2010) Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas. Applied Physics Letters, 96 (26). 261501pp. doi:10.1063/1.3458696
Plain TextYuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R. A., Najmabadi, F. (2010) Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas. Applied Physics Letters, 96 (26). 261501pp. doi:10.1063/1.3458696
In(2010, June) Applied Physics Letters Vol. 96 (26) AIP Publishing

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Tao, Y., Tillack, M. S., Sequoia, K. L., Burdt, R. A., Yuspeh, S., Najmabadi, F. (2008) Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse. Applied Physics Letters, 92 (25). 251501pp. doi:10.1063/1.2951595
Yuspeh, S., Tao, Y., Burdt, R. A., Tillack, M. S., Ueno, Y., Najmabadi, F. (2011) Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source. Applied Physics Letters, 98 (20). 201501pp. doi:10.1063/1.3589359
Yuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R., Najmabadi, F. (2008) Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source. Applied Physics Letters, 93 (22). 221503pp. doi:10.1063/1.3036956
Sequoia, K. L., Tao, Y., Yuspeh, S., Burdt, R., Tillack, M. S. (2008) Two dimensional expansion effects on angular distribution of 13.5nm in-band extreme ultraviolet emission from laser-produced Sn plasma. Applied Physics Letters, 92 (22). 221505pp. doi:10.1063/1.2938717
Yuspeh, S., Ueno, Y., Tillack, M. S., Burdt, R., Tao, Y., Najmabadi, F. (2011) Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target. Journal of Applied Physics, 109 (7). 76102pp. doi:10.1063/1.3572038
Burdt, Russell A., Ueno, Yoshifumi, Tao, Yezheng, Yuspeh, Sam, Tillack, Mark S., Najmabadi, Farrokh (2010) Recombination effects during expansion into vacuum in laser produced Sn plasma. Applied Physics Letters, 97 (4). 41502pp. doi:10.1063/1.3473817
Tao, Y., Tillack, M. S., Amin, N., Burdt, R. A., Yuspeh, S., Shaikh, N. M., Najmabadi, F. (2009) Flexible CO2 laser system for fundamental research related to an extreme ultraviolet lithography source. Review of Scientific Instruments, 80 (12). 123503pp. doi:10.1063/1.3270257
Burdt, Russell A., Yuspeh, Sam, Sequoia, Kevin L., Tao, Yezheng, Tillack, Mark S., Najmabadi, Farrokh (2009) Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser. Journal of Applied Physics, 106 (3). 33310pp. doi:10.1063/1.3190537
Burdt, Russell A., Ueno, Yoshifumi, Tao, Yezheng, Yuspeh, Sam, Tillack, Mark S., Najmabadi, Farrokh (2010) Erratum: “Recombination effects during expansion into vacuum in laser produced Sn plasma” [Appl. Phys. Lett. 97, 041502 (2010)]. Applied Physics Letters, 97 (16). 169901pp. doi:10.1063/1.3504216
Tao, Y., Tillack, M. S., Harilal, S. S., Sequoia, K. L., Najmabadi, F. (2007) Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source. Journal of Applied Physics, 101 (2). 23305pp. doi:10.1063/1.2426883
Shaikh, Nek M., Tao, Y., Burdt, R. A., Yuspeh, S., Amin, N., Tillack, M. S. (2010) Spectroscopic analysis of temperature and density of Sn plasma produced by a CO2 laser. Journal of Applied Physics, 108 (8). 83109pp. doi:10.1063/1.3475369
 
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