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Chiesa, Marco, Garcia, Ricardo (2010) Nanoscale space charge generation in local oxidation nanolithography. Applied Physics Letters, 96 (26). 263112pp. doi:10.1063/1.3459976

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Reference TypeJournal (article/letter/editorial)
TitleNanoscale space charge generation in local oxidation nanolithography
JournalApplied Physics Letters
AuthorsChiesa, MarcoAuthor
Garcia, RicardoAuthor
Year2010 (June 28)Volume96
Issue26
PublisherAIP Publishing
DOIdoi:10.1063/1.3459976Search in ResearchGate
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Mindat Ref. ID8584806Long-form Identifiermindat:1:5:8584806:7
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Full ReferenceChiesa, Marco, Garcia, Ricardo (2010) Nanoscale space charge generation in local oxidation nanolithography. Applied Physics Letters, 96 (26). 263112pp. doi:10.1063/1.3459976
Plain TextChiesa, Marco, Garcia, Ricardo (2010) Nanoscale space charge generation in local oxidation nanolithography. Applied Physics Letters, 96 (26). 263112pp. doi:10.1063/1.3459976
In(2010, June) Applied Physics Letters Vol. 96 (26) AIP Publishing

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Tello, Marta, Garcı́a, Fernando, Garcı́a, Ricardo (2002) Linewidth determination in local oxidation nanolithography of silicon surfaces. Journal of Applied Physics, 92 (7). 4075-4079 doi:10.1063/1.1501753
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Martinez, Javier, Losilla, Nuria S., Biscarini, Fabio, Schmidt, Georg, Borzenko, Tanja, Molenkamp, Laurens W., Garcia, Ricardo (2006) Development of a parallel local oxidation nanolithography instrument. Review of Scientific Instruments, 77 (8). 86106pp. doi:10.1063/1.2336773
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Zhang, Xiangxue, Samiullah, Mohammad, Yu, Ping (2010) Space-charge electric field in photorefractive multiple quantum wells. Applied Physics Letters, 96 (15). 152106pp. doi:10.1063/1.3367728
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