Bachmann, Julien, Zierold, Robert, Chong, Yuen Tung, Hauert, Roland, Sturm, Chris, Schmidt-Grund, Rüdiger, Rheinländer, Bernd, Grundmann, Marius, Gösele, Ulrich, Nielsch, Kornelius (2008) A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide. Angewandte Chemie International Edition, 47 (33). 6177-6179 doi:10.1002/anie.200800245

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Reference Type	Journal (article/letter/editorial)
Title	A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide
Journal	Angewandte Chemie International Edition
Authors	Bachmann, Julien		Author
	Zierold, Robert		Author
	Chong, Yuen Tung		Author
	Hauert, Roland		Author
	Sturm, Chris		Author
	Schmidt-Grund, Rüdiger		Author
	Rheinländer, Bernd		Author
	Grundmann, Marius		Author
	Gösele, Ulrich		Author
	Nielsch, Kornelius		Author
Year	2008 (August 4)	Volume	47
Issue	33
Publisher	Wiley
DOI	doi:10.1002/anie.200800245Search in ResearchGate
	Generate Citation Formats
Mindat Ref. ID	8585981	Long-form Identifier	mindat:1:5:8585981:4
GUID	0
Full Reference	Bachmann, Julien, Zierold, Robert, Chong, Yuen Tung, Hauert, Roland, Sturm, Chris, Schmidt-Grund, Rüdiger, Rheinländer, Bernd, Grundmann, Marius, Gösele, Ulrich, Nielsch, Kornelius (2008) A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide. Angewandte Chemie International Edition, 47 (33). 6177-6179 doi:10.1002/anie.200800245
Plain Text	Bachmann, Julien, Zierold, Robert, Chong, Yuen Tung, Hauert, Roland, Sturm, Chris, Schmidt-Grund, Rüdiger, Rheinländer, Bernd, Grundmann, Marius, Gösele, Ulrich, Nielsch, Kornelius (2008) A Practical, Self-Catalytic, Atomic Layer Deposition of Silicon Dioxide. Angewandte Chemie International Edition, 47 (33). 6177-6179 doi:10.1002/anie.200800245
In	(2008, August) Angewandte Chemie International Edition Vol. 47 (33) Wiley

	Bachmann, Julien, Zierold, Robert, Chong, Yuen Tung, Hauert, Roland, Sturm, Chris, Schmidt-Grund, Rüdiger, Rheinländer, Bernd, Grundmann, Marius, Gösele, Ulrich, Nielsch, Kornelius (2008) Selbstkatalytische Atomlagenabscheidung von Siliciumdioxid. Angewandte Chemie, 120 (33). 6272-6274 doi:10.1002/ange.200800245
	Albrecht, Ole, Zierold, Robert, Patzig, Christian, Bachmann, Julien, Sturm, Chris, Rheinländer, Bernd, Grundmann, Marius, Görlitz, Detlef, Rauschenbach, Bernd, Nielsch, Kornelius (2010) Tubular magnetic nanostructures based on glancing angle deposited templates and atomic layer deposition. physica status solidi (b), 247 (6). 1365-1371 doi:10.1002/pssb.200945560
	Chong, Yuen Tung, Yau, Eric Man Yan, Nielsch, Kornelius, Bachmann, Julien (2010) Direct Atomic Layer Deposition of Ternary Ferrites with Various Magnetic Properties. Chemistry of Materials, 22. 6506-6508 doi:10.1021/cm102600m
	Bachmann, Julien, Nielsch, Kornelius (2008) Nanotechnology. Understanding Small Systems. By Ben Rogers, Sumita Pennathur, and Jesse Adams. Angewandte Chemie International Edition, 47 (26). 4778-4779 doi:10.1002/anie.200785587
	Sturm, Chris, Hilmer, Helena, Rheinländer, Bernd, Schmidt-Grund, Rüdiger, Grundmann, Marius (2011) Cavity-photon dispersion in one-dimensional confined microresonators with an optically anisotropic cavity material. Physical Review B, 83 (20) doi:10.1103/physrevb.83.205301
	Chen, Xin, Knez, Mato, Berger, Andreas, Nielsch, Kornelius, Gösele, Ulrich, Steinhart, Martin (2007) Formation of Titania/Silica Hybrid Nanowires Containing Linear Mesocage Arrays by Evaporation-Induced Block-Copolymer Self-Assembly and Atomic Layer Deposition. Angewandte Chemie International Edition, 46 (36). 6829-6832 doi:10.1002/anie.200700923
	Lee, Woo, Scholz, Roland, Nielsch, Kornelius, Gösele, Ulrich (2005) A Template-Based Electrochemical Method for the Synthesis of Multisegmented Metallic Nanotubes. Angewandte Chemie International Edition, 44 (37). 6050-6054 doi:10.1002/anie.200501341
	Schmidt-Grund, Rüdiger, Hilmer, Helena, Hinkel, Annekatrin, Sturm, Chris, Rheinländer, Bernd, Gottschalch, Volker, Lange, Martin, Zúñiga-Pérez, Jesus, Grundmann, Marius (2010) Two-dimensional confined photonic wire resonators - strong light-matter coupling. physica status solidi (b), 247 (6). 1351-1364 doi:10.1002/pssb.200945530
	Chong, Yuen Tung, Yau, Man Yan Eric, Yang, Yang, Zacharias, Margit, Görlitz, Detlef, Nielsch, Kornelius, Bachmann, Julien (2011) Superparamagnetic behavior in cobalt iron oxide nanotube arrays by atomic layer deposition. Journal of Applied Physics, 110 (4). 43930pp. doi:10.1063/1.3627369
	Richter, Steffen, Michalsky, Tom, Sturm, Chris, Rosenow, Bernd, Grundmann, Marius, Schmidt-Grund, Rüdiger (2017) Exceptional points in anisotropic planar microcavities. Physical Review A, 95 (2). doi:10.1103/physreva.95.023836
	*Kranert, Christian, Sturm, Chris, Schmidt-Grund, Rüdiger, Grundmann, Marius (2016) Raman tensor elements of β-Ga2O3. Scientific Reports, 6. doi:10.1038/srep35964*

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