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Castez, Marcos F., Salvarezza, Roberto C., Nakamura, Jun, Sudoh, Koichi (2010) A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings. Applied Physics Letters, 97 (12). 123104pp. doi:10.1063/1.3492442

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Reference TypeJournal (article/letter/editorial)
TitleA theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings
JournalApplied Physics Letters
AuthorsCastez, Marcos F.Author
Salvarezza, Roberto C.Author
Nakamura, JunAuthor
Sudoh, KoichiAuthor
Year2010 (September 20)Volume97
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.3492442Search in ResearchGate
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Mindat Ref. ID8586724Long-form Identifiermindat:1:5:8586724:8
GUID0
Full ReferenceCastez, Marcos F., Salvarezza, Roberto C., Nakamura, Jun, Sudoh, Koichi (2010) A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings. Applied Physics Letters, 97 (12). 123104pp. doi:10.1063/1.3492442
Plain TextCastez, Marcos F., Salvarezza, Roberto C., Nakamura, Jun, Sudoh, Koichi (2010) A theoretical framework to obtain interface’s shapes during the high-temperature annealing of high-aspect-ratio gratings. Applied Physics Letters, 97 (12). 123104pp. doi:10.1063/1.3492442
In(2010, September) Applied Physics Letters Vol. 97 (12) AIP Publishing

See Also

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Castez, Marcos F., Salvarezza, Roberto C. (2009) Modeling thermal decay of high-aspect-ratio nanostructures. Applied Physics Letters, 94 (5). 53103pp. doi:10.1063/1.3077030
Madrid, Marcos A., Salvarezza, Roberto C., Castez, Marcos F. (2013) Surface-diffusion-driven decay of high-aspect-ratio gratings: Existence of morphologically related classes. Physical Review E, 87 (6) doi:10.1103/physreve.87.062407
Madrid, Marcos A, Salvarezza, Roberto C, Castez, Marcos F (2012) One-dimensional gratings evolving through high-temperature annealing: sine-generated solutions. Journal of Physics: Condensed Matter, 24 (1). 15001pp. doi:10.1088/0953-8984/24/1/015001
Castez, Marcos F., Fonticelli, Mariano H., Azzaroni, Omar, Salvarezza, Roberto C., Solari, Hernán G. (2005) Pattern preserving deposition: Experimental results and modeling. Applied Physics Letters, 87 (12). 123104pp. doi:10.1063/1.2053368
Nakamura, Jun, Sudoh, Koichi, Iwasaki, Hiroshi (2007) Evolution of One-Dimensional Gratings with High Aspect Ratios on Si(001) Surfaces by High-Temperature Annealing. Japanese Journal of Applied Physics, 46 (11) 7194-7197 doi:10.1143/jjap.46.7194
Castez, Marcos Federico, dos Santos Claro, Paula Cecilia, Schilardi, Patricia Laura, Andreasen, Gustavo, Salvarezza, Roberto Carlos (2010) Surface Relaxation of High-Aspect-Ratio Nanostructures: Theory and Experiments. The Journal of Physical Chemistry C, 114 (10). 4603-4610 doi:10.1021/jp911176y
Sudoh, K., Hiruta, R., Kuribayashi, H. (2013) Shape evolution of high aspect ratio holes on Si(001) during hydrogen annealing. Journal of Applied Physics, 114 (18). 183512pp. doi:10.1063/1.4829912
Castez, Marcos F., Salvarezza, Roberto C., Solari, Hernán G. (2006) Modeling growth from the vapor and thermal annealing on micro- and nanopatterned substrates. Physical Review E, 73 (1) doi:10.1103/physreve.73.011607
Sudoh, K., Naito, M. (2010) Interfacial reaction of Si islands on SiO2 during high-temperature annealing. Journal of Applied Physics, 108 (8). 83520pp. doi:10.1063/1.3500506
Castez, Marcos F., Salvarezza, Roberto C., Solari, Hernán G. (2004) Probing universality classes in solid-on-solid deposition. Physical Review E, 70 (1) doi:10.1103/physreve.70.011605
Castez, Marcos F., Blum, Bárbara, Salvarezza, Roberto C., Solari, Hernán G. (2003) Dynamics of solid growth under a gravitational field: Influence of the formation of a diffusive layer. Physical Review E, 67 (6) doi:10.1103/physreve.67.061605
 
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